Solid‐State Nuclear Magnetic Resonance Spectroscopy of Low Dielectric Constant Films from Pulsed Hydrofluorocarbon Plasmas

1999 ◽  
Vol 146 (7) ◽  
pp. 2652-2658 ◽  
Author(s):  
Kenneth K.S. Lau ◽  
Karen K. Gleason
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