Solid‐State Nuclear Magnetic Resonance Spectroscopy of Low Dielectric Constant Films from Pulsed Hydrofluorocarbon Plasmas
1999 ◽
Vol 146
(7)
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pp. 2652-2658
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1988 ◽
Vol 84
(11)
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pp. 3803
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2006 ◽
Vol 99
(6)
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pp. 3062-3069
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2018 ◽
pp. 213-279
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