Lithium‐Manganese‐Oxide Thin‐Film Cathodes Prepared by Plasma‐Enhanced Chemical Vapor Deposition

1999 ◽  
Vol 146 (6) ◽  
pp. 2001-2005 ◽  
Author(s):  
Ping Liu ◽  
Ji‐Guang Zhang ◽  
John A. Turner ◽  
C. Edwin Tracy ◽  
David K. Benson
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Manganese Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Film ◽  
Lithium Manganese Oxide ◽  
Lithium Manganese

Zinc oxide thin film synthesized by combustion chemical vapor deposition

2008 ◽  
Vol 255 (5) ◽  
pp. 2859-2863 ◽  
Author(s):  
Zhi-Yang Li ◽  
Fuchun Xu ◽  
Qi-Hui Wu ◽  
Jing Li
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film

The Effect of SnOx as the Protective Layer for the Lithium Manganese Oxide Thin Film

2007 ◽  
Vol 124-126 ◽  
pp. 1047-1050
Author(s):  
Hee Soo Moon ◽  
Jae Hun Yang ◽  
Jae Ho Lee ◽  
Seung Ho Ahn ◽  
Jong Wan Park
Keyword(s):  
Thin Film ◽  
Manganese Oxide ◽  
Protective Layer ◽  
Lithium Ion ◽  
Liquid Electrolyte ◽  
Oxide Thin Film ◽  
Lithium Manganese Oxide ◽  
Radio Frequency Magnetron Sputtering ◽  
Spinel Limn2o4 ◽  
Lithium Manganese

Lithium manganese oxide (LiMn2O4) had been a promising material for lithium-ion and thin film batteries. However, the LiMn2O4 had some problems such as the manganese dissolution into liquid electrolyte. In order to improve cycleability, we introduced SnOx layer as protective layer. This layer was deposited on spinel LiMn2O4 by using radio frequency magnetron sputtering. The deposited SnOx layer fully covered the LiMn2O4 , and didn’t make a change the crystallinity of the spinel films. The SnOx layer prevented direct contact of liquid electrolyte and improved the cycle retention.

Growth mechanism of zinc oxide thin film by mist chemical vapor deposition via the modulation of [H2O]/[Zn] ratios

2019 ◽  
Vol 12 (6) ◽  
pp. 065505 ◽  
Author(s):  
Phimolphan Rutthongjan ◽  
Misaki Nishi ◽  
Li Liu ◽  
Shota Sato ◽  
Yuya Okada ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Growth Mechanism ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Film ◽  
Zinc Oxide Thin Film

Excimer Laser-Assisted Chemical Vapor Deposition of Metal-Oxide Thin Film from β-Diketone Complexes

1991 ◽  
Vol 30 (Part 2, No. 1A) ◽  
pp. L35-L38 ◽  
Author(s):  
Takahisa Ushida ◽  
Kazutoshi Higashiyama ◽  
Izumi Hirabayashi ◽  
Shoji Tanaka
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Metal Oxide ◽  
Excimer Laser ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film
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