(Invited) Metal Oxide Decorated Porous Silicon Interfaces for Sensor Applications: The Question of Water Interaction, Stability, Platform Diversity, Sensitivity, and Selectivity

2020 ◽  
Vol 98 (2) ◽  
pp. 107-118
Author(s):  
James L. Gole
Keyword(s):  
Porous Silicon ◽  
Metal Oxide ◽  
Sensor Applications ◽  
Water Interaction ◽  
Sensitivity And Selectivity

scholarly journals SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 701 ◽  
Author(s):  
Verena Leitgeb ◽  
Katrin Fladischer ◽  
Frank Hitzel ◽  
Florentyna Sosada-Ludwikowska ◽  
Johanna Krainer ◽  
...  
Keyword(s):  
Electron Beam ◽  
Metal Oxide ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Semiconductor Nanowires ◽  
Kelvin Probe ◽  
Sensor Applications ◽  
Sensitivity And Selectivity ◽  
Stable Performance ◽  
Metal Oxide Gas Sensors

Integration of metal oxide nanowires in metal oxide gas sensors enables a new generation of gas sensor devices, with increased sensitivity and selectivity. For reproducible and stable performance of next generation sensors, the electric properties of integrated nanowires have to be well understood, since the detection principle of metal oxide gas sensors is based on the change in electrical conductivity during gas exposure. We study two different types of nanowires that show promising properties for gas sensor applications with a Scanning Probe Microscope—Scanning Electron Microscope combination. Electron Beam Induced Current and Kelvin Probe Force Microscopy measurements with a lateral resolution in the nanometer regime are performed. Our work offers new insights into the dependence of the nanowire work function on its composition and size, and into the local interaction between electron beam and semiconductor nanowires.

Pulsed laser deposition of metal oxide nanostructures for highly sensitive gas sensor applications

2016 ◽  
Vol 236 ◽  
pp. 978-987 ◽  
Author(s):  
Joni Huotari ◽  
Ville Kekkonen ◽  
Tomi Haapalainen ◽  
Martin Leidinger ◽  
Tilman Sauerwald ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Pulsed Laser Deposition ◽  
Gas Sensor ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Sensor Applications ◽  
Oxide Nanostructures ◽  
Highly Sensitive ◽  
Metal Oxide Nanostructures

Metal-oxide nanostructures produced by PLD in open air for gas sensor applications

2019 ◽  
Vol 470 ◽  
pp. 861-869 ◽  
Author(s):  
G. Atanasova ◽  
A. Og. Dikovska ◽  
T. Dilova ◽  
B. Georgieva ◽  
G.V. Avdeev ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Sensor Applications ◽  
Oxide Nanostructures ◽  
Metal Oxide Nanostructures

Porous silicon membranes for gas-sensor applications

1995 ◽  
Vol 46 (1-3) ◽  
pp. 43-46 ◽  
Author(s):  
T. Taliercio ◽  
M. Dilhan ◽  
E. Massone ◽  
A. Foucaran ◽  
A.M. Gué ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Gas Sensor ◽  
Sensor Applications ◽  
Silicon Membranes

Metal Oxide Nanowires for Gas Sensor Applications

2014 ◽  
Vol 159 (9) ◽  
pp. 385-389 ◽  
Author(s):  
Anton Köck ◽  
Livia Chitu ◽  
Stefan Defregger ◽  
Elke Kraker ◽  
Günther Maier ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Gas Sensor ◽  
Oxide Nanowires ◽  
Sensor Applications ◽  
Metal Oxide Nanowires
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