Boosting Ge-Epi P-Well Mobility & Crystal Quality with Si or Sn Implantation and Melt Annealing
2020 ◽
Vol 12
(2)
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pp. 02012-1-02012-5
2014 ◽
Vol 887-888
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pp. 86-89
2005 ◽
Vol 61
(a1)
◽
pp. c9-c9
Keyword(s):
2012 ◽
Vol 59
(1)
◽
pp. 128-134
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2011 ◽
Vol 32
(12)
◽
pp. 1701-1703
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