Angle-Resolved Photoelectron Spectroscopy Studies of Initial Stage of Thermal Oxidation on 4H-SiC (0001) on-Axis and 4° Off-Axis Substrates

2017 ◽  
Vol 77 (6) ◽  
pp. 51-57
Author(s):  
Hitoshi Arai ◽  
Ryoma Toyoda ◽  
Ai Ishohashi ◽  
Yasuhisa Sano ◽  
Hiroshi Nohira
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