Silicon Anodization As a New Way to Transfer 3D Nano-Imprinted Pattern into a Substrate

2017 ◽  
Vol 77 (4) ◽  
pp. 119-125
Author(s):  
Lamia Nouri ◽  
Nicolas Posseme ◽  
Stéfan Landis ◽  
Frederic Milesi ◽  
Frédéric Gaillard ◽  
...  
Keyword(s):  
Silicon Anodization

Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces

2011 ◽  
Vol 325 ◽  
pp. 666-671 ◽  
Author(s):  
Alexey Ivanov ◽  
Ulrich Mescheder
Keyword(s):  
Surface Quality ◽  
Electrochemical Etching ◽  
Thin Layers ◽  
Etch Depth ◽  
Work Piece ◽  
Fluidic Devices ◽  
Current Densities ◽  
Shape Controlling ◽  
Silicon Anodization

In this paper the process of silicon anodization as a structuring technique is discussed. 3D-structuring is achieved by 3D control of current density in an anodization process. In contrast to conventional ECM techniques electrodes as structured thin layers on the work piece are used. For the shape controlling of etch form frontside masking design and local backside doping are presented. Influences of the opening size and etch depth on the shape of the etch form is shown. The surface quality of the resulting 3D structures is investigated, with best surface quality (about 1 nm rms) being obtained for electropolishing in 7 wt.% HF at applied current densities of 100 ‑ 300 mA/cm². Application of 3D silicon forms for injection moulding is demonstrated and further implementations of the process for optical and fluidic devices are discussed.

Silicon Anodization in HF Ethanoic Solutions

2002 ◽  
Vol 149 (6) ◽  
pp. C331 ◽  
Author(s):  
Didier Hamm ◽  
Junji Sasano ◽  
Tetsuo Sakka ◽  
Yukio H. Ogata
Keyword(s):  
Silicon Anodization

High quality 3D shapes by silicon anodization

2011 ◽  
Vol 208 (6) ◽  
pp. 1383-1388 ◽  
Author(s):  
Alexey Ivanov ◽  
Andras Kovacs ◽  
Ulrich Mescheder
Keyword(s):  
High Quality ◽  
Silicon Anodization ◽  
3D Shapes
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