Machine Learning Based Lithography Hotspot Detection with Sparse Feature Encoding and Hierarchical Pattern Classification
Keyword(s):
2010 ◽
pp. 147-175
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2018 ◽
Vol 1067
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pp. 072036
Keyword(s):
1988 ◽
Vol 28
(2)
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pp. 145-162
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2018 ◽
Vol 37
(7)
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pp. 1510-1514
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