Substrate Design and Thermal Budget Tuning for Integration of Photonic Components in a High-Performance SiGe:C BiCMOS Process

2013 ◽  
Vol 50 (9) ◽  
pp. 297-303 ◽  
Author(s):  
D. Knoll ◽  
H. H. Richter ◽  
B. Heinemann ◽  
S. Lischke ◽  
Y. Yamamoto ◽  
...  
Keyword(s):  
High Performance ◽  
Thermal Budget ◽  
Bicmos Process ◽  
Photonic Components

High performance integrated photonic components for laser systems (Conference Presentation)

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Hannah Grant ◽  
Jes Sherman ◽  
...  
Keyword(s):  
High Performance ◽  
Laser Systems ◽  
Photonic Components

High-Performance a-IGZO TFT Fabricated With Ultralow Thermal Budget via Microwave Annealing

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Author(s):  
Tiantian Pi ◽  
Dongqi Xiao ◽  
Hui Yang ◽  
Gang He ◽  
Xiaohan Wu ◽  
...  
Keyword(s):  
High Performance ◽  
Thermal Budget ◽  
Microwave Annealing ◽  
Igzo Tft
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