Pressure Dependent Characteristics of an Ork Ridge Type Duoplasmatron Ion Source I. Discharge Characteristics

1967 ◽  
Vol 6 (6) ◽  
pp. 758-764 ◽  
Author(s):  
Masanori Watanabe ◽  
Tokuo Suita
2016 ◽  
Vol 18 (12) ◽  
pp. 1220-1224 ◽  
Author(s):  
Doo-Hee Chang ◽  
Seung Ho Jeong ◽  
Min Park ◽  
Tae-Seong Kim ◽  
Bong-Ki Jung ◽  
...  

1999 ◽  
Vol 70 (5) ◽  
pp. 2338-2344 ◽  
Author(s):  
Shiro Asano ◽  
Katsuyoshi Tsumori ◽  
Toshihisa Okuyama ◽  
Yasuo Suzuki ◽  
Masaki Osakabe ◽  
...  

1989 ◽  
Vol 22 (9) ◽  
pp. 1275-1280 ◽  
Author(s):  
P J Harrold ◽  
T A Delchar

2020 ◽  
pp. 169-173
Author(s):  
A. Zykov ◽  
N. Yefymenko ◽  
S. Dudin ◽  
S. Yakovin

The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude and topology of magnetic field have been researched both for autonomous operation of the planar magnetron discharge and Hall type ion source in plasma mode and for their combination. Spatial distributions of ion current are also presented.


2002 ◽  
Vol 73 (2) ◽  
pp. 961-963 ◽  
Author(s):  
T. Kosaka ◽  
H. Yamashita ◽  
S. Miyamoto ◽  
S. Inoue ◽  
H. Horiike

2011 ◽  
Vol 59 (2) ◽  
pp. 275-280 ◽  
Author(s):  
Doo Hee Chang ◽  
Seung Ho Jeong ◽  
Jung-Tae Jin ◽  
Dae-Sik Chang ◽  
Tae-Seong Kim ◽  
...  

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