High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications

2007 ◽  
Vol 46 (12) ◽  
pp. 7643-7647 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Yi Zhang ◽  
Takashi Mihara ◽  
Toshihiro Itoh ◽  
...  
Keyword(s):  
Quality Factor ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
High Quality Factor ◽  
Mass Sensing ◽  
High Quality ◽  
Sensing Applications ◽  
Zirconate Titanate ◽  
Silicon Cantilever ◽  
Piezoelectric Lead Zirconate Titanate

Mechanical Quality Factor of Lead Zirconate Titanate/Epoxy Composites

2000 ◽  
Vol 628 ◽  
Author(s):  
K.C. Cheng ◽  
H.L.W. Chan ◽  
S.W. Or ◽  
C.L. Choy
Keyword(s):  
Quality Factor ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Mechanical Quality Factor ◽  
Epoxy Composites ◽  
Ceramic Phase ◽  
Zirconate Titanate ◽  
Wide Range ◽  
Mechanical Quality ◽  
Piezoelectric Lead Zirconate Titanate

ABSTRACTThe mechanical quality factor Qm of 1–3 piezoelectric lead zirconate titanate/epoxy composites with ceramic volume fractions φ ranging from 0.18 to 0.82 has been measured. This range of φ is wider than those previously investigated by other workers. The width-to-thickness ratio of the ceramic phase is sufficiently small that there are no significant mode couplings. The observed Qm agrees well with the prediction of the parallel model. It is found that Qm increases from 34 to 100 as φ changes from 0 to 0.82 and then increases sharply to reach a high value of 600 at φ = 1. Therefore Qm can be tailored to give a wide range of values by varying φ.

Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film

2006 ◽  
Vol 13 (11-12) ◽  
pp. 1517-1522 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Takeshi Kobayashi ◽  
Ryutaro Maeda ◽  
Takashi Mihara
Keyword(s):  
Quality Factor ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate

Sol-Gel Bonded Piezoelectric Lead Zirconate Titanate Ceramics

2006 ◽  
pp. 2477-2482
Author(s):  
Chontira Sangsubun ◽  
Anucha Watcharapasorn ◽  
Manoch Naksata ◽  
Tawee Tunkasiri ◽  
Sukanda Jiansirisomboon
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Piezoelectric Lead Zirconate Titanate ◽  
Titanate Ceramics
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