High-Spatial-Resolution Machining Utilizing Atmospheric Pressure Plasma: Machining Characteristics of Silicon
2006 ◽
Vol 45
(10B)
◽
pp. 8281-8285
◽
Keyword(s):
2013 ◽
Vol 133
(5)
◽
pp. 164-169
◽
Keyword(s):
2018 ◽
Vol 677
(1)
◽
pp. 135-142
Keyword(s):