Modeling of Reaction Pathways of GaN Growth by Metalorganic Vapor-Phase Epitaxy Using TMGa/NH3/H2System: A Computational Fluid Dynamics Simulation Study

2005 ◽  
Vol 44 (2) ◽  
pp. 874-879 ◽  
Author(s):  
Akira Hirako ◽  
Kazuhide Kusakabe ◽  
Kazuhiro Ohkawa
Vacuum ◽  
2015 ◽  
Vol 116 ◽  
pp. 144-152 ◽  
Author(s):  
Xiang-Ji Yue ◽  
Yan-jun Lu ◽  
Ying-Li Zhang ◽  
De-chun Ba ◽  
Guang-Yu Wang ◽  
...  

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