Experimental and Numerical Analysis of An Inhibitor-Containing Slurry for Copper Chemical Mechanical Planarization

Yun Zhuang; Zhonglin Li; Yoshitomo Shimazu; Nobuo Uotani; Leonard Borucki; Ara Philipossian

doi:10.1143/jjap.44.82

Experimental and Numerical Analysis of An Inhibitor-Containing Slurry for Copper Chemical Mechanical Planarization

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.82 ◽

2005 ◽

Vol 44 (1A) ◽

pp. 82-86 ◽

Cited By ~ 9

Author(s):

Yun Zhuang ◽

Zhonglin Li ◽

Yoshitomo Shimazu ◽

Nobuo Uotani ◽

Leonard Borucki ◽

...

Keyword(s):

Numerical Analysis ◽

Chemical Mechanical Planarization

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Experimental and Numerical Analysis of A Novel Ceria Based Abrasive Slurry for Interlayer Dielectric Chemical Mechanical Planarization

Transactions on Electrical and Electronic Materials ◽

10.4313/teem.2007.8.2.053 ◽

2007 ◽

Vol 8 (2) ◽

pp. 53-57 ◽

Cited By ~ 7

Author(s):

Yun Zhuanga ◽

Leonard Borucki ◽

Ara Philipossian ◽

Eric Dien ◽

Mohamed Ennahali ◽

...

Keyword(s):

Numerical Analysis ◽

Chemical Mechanical Planarization ◽

Interlayer Dielectric

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Epidemiology of Ovine Campylobacter Infection Determined by Numerical Analysis of Electrophoretic Protein Profiles

Journal of Veterinary Medicine Series B ◽

10.1046/j.1439-0450.2000.00409.x ◽

2000 ◽

Vol 47 (10) ◽

pp. 739-744 ◽

Cited By ~ 10

Author(s):

K. S. Diker ◽

O. M. Esendal ◽

M. Akan

Keyword(s):

Numerical Analysis ◽

Protein Profiles ◽

Campylobacter Infection

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A First Course in the Numerical Analysis of Differential Equations

10.1017/cbo9780511995569 ◽

2008 ◽

Cited By ~ 94

Author(s):

Arieh Iserles

Keyword(s):

Numerical Analysis ◽

Differential Equations

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Numerical analysis of two operator splitting methods for an hyperbolic system of conservation laws with stiff relaxation

International Journal of Multiphase Flow ◽

10.1016/s0301-9322(97)88233-x ◽

1996 ◽

Vol 22 ◽

pp. 106

Author(s):

E Burman

Keyword(s):

Numerical Analysis ◽

Conservation Laws ◽

Hyperbolic System ◽

Operator Splitting ◽

Splitting Methods ◽

Operator Splitting Methods ◽

System Of Conservation Laws ◽

Stiff Relaxation

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Numerical Analysis of Power System Transients and Dynamics

10.1049/pbpo078e ◽

2015 ◽

Cited By ~ 15

Keyword(s):

Numerical Analysis ◽

Power System ◽

Power System Transients

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Experimental and numerical analysis of high strain rate response of Ti-6Al-4V titanium alloy

DYMAT 2009 - 9th International Conferences on the Mechanical and Physical Behaviour of Materials under Dynamic Loading ◽

10.1051/dymat/2009207 ◽

2009 ◽

Cited By ~ 2

Author(s):

A. Bragov ◽

A. Konstantinov ◽

A. Lomunov ◽

I. Sergeichev ◽

B. Fedulov

Keyword(s):

Titanium Alloy ◽

Numerical Analysis ◽

High Strain Rate ◽

Strain Rate ◽

High Strain

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Numerical analysis of strain gradient effects in periodic media

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:2001519 ◽

2001 ◽

Vol 11 (PR5) ◽

pp. Pr5-153-Pr5-160 ◽

Cited By ~ 5

Author(s):

R. H.J. Peerlings ◽

N. A. Fleck

Keyword(s):

Numerical Analysis ◽

Strain Gradient ◽

Periodic Media ◽

Strain Gradient Effects ◽

Gradient Effects

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Numerical analysis of electro-osmotic flows through elliptic microchannels

La Houille Blanche ◽

10.1051/lhb/2013024 ◽

2013 ◽

pp. 42-49 ◽

Cited By ~ 3

Author(s):

Pamela Vocale ◽

Michela Geri ◽

Luca Cattani ◽

Gian Luca Morini ◽

Marco Spiga

Keyword(s):

Numerical Analysis

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Numerical Analysis on the Calandria Tubes in the Moderator of a Heavy Water Reactor Using OpenFOAM and Other Codes

SNA + MC 2013 - Joint International Conference on Supercomputing in Nuclear Applications + Monte Carlo ◽

10.1051/snamc/201401204 ◽

2014 ◽

Author(s):

Se-Myong Chang ◽

Hyoung Tae Kim

Keyword(s):

Numerical Analysis ◽

Heavy Water ◽

Water Reactor ◽

Heavy Water Reactor

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Chemical-Mechanical Planarization of Semiconductor Materials

10.1007/978-3-662-06234-0 ◽

2004 ◽

Cited By ~ 85

Keyword(s):

Chemical Mechanical Planarization ◽

Semiconductor Materials

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