New Techniques for Simulation of Ion Implantation by Numerical Integration of Boltzmann Transport Equation

Shyh-Wei Wang; Shuang-Fa Guo

doi:10.1143/jjap.37.299

New Techniques for Simulation of Ion Implantation by Numerical Integration of Boltzmann Transport Equation

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.299 ◽

1998 ◽

Vol 37 (Part 1, No. 1) ◽

pp. 299-302

Author(s):

Shyh-Wei Wang ◽

Shuang-Fa Guo

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Numerical Integration ◽

Boltzmann Transport Equation ◽

Boltzmann Transport ◽

New Techniques

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A two-dimensional Boltzmann transport equation approach to ion implantation in silicon

IEEE Electron Device Letters ◽

10.1109/edl.1983.25791 ◽

1983 ◽

Vol 4 (12) ◽

pp. 430-432 ◽

Cited By ~ 5

Author(s):

T. Takeda ◽

A. Yoshii

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Two Dimensional ◽

Equation Approach ◽

Boltzmann Transport

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Calculation of Channeling Effects During Ion Implantation Using the Boltzmann Transport Equation

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems ◽

10.1109/tcad.1985.1270133 ◽

1985 ◽

Vol 4 (4) ◽

pp. 362-368 ◽

Cited By ~ 4

Author(s):

M.D. Giles ◽

J.F. Gibbons

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Boltzmann Transport

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Two-dimensional modeling based on boltzmann transport equation for ion implantation

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.4420680406 ◽

1985 ◽

Vol 68 (4) ◽

pp. 44-53

Author(s):

Tadao Takeda ◽

Akira Yoshii

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Two Dimensional ◽

Boltzmann Transport ◽

Dimensional Modeling

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Modeling of high energy ion implantation based on splitting of the Boltzmann transport equation

Computational Materials Science ◽

10.1016/s0927-0256(02)00321-x ◽

2002 ◽

Vol 25 (3) ◽

pp. 435-446

Author(s):

Igor E Mozolevski

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

High Energy ◽

Boltzmann Transport

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Parallel Simulation of Ion Implantation for Multi-Component Targets Using Boltzmann Transport Equation

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l781 ◽

1998 ◽

Vol 37 (Part 2, No. 7A) ◽

pp. L781-L783

Author(s):

Shyh-Wei Wang ◽

Shuang-Fa Guo

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Parallel Simulation ◽

Boltzmann Transport

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Two-dimensional boltzmann transport equation approach to simulation of local ion implantation

Radiation Effects and Defects in Solids ◽

10.1080/10420159508220014 ◽

1995 ◽

Vol 133 (2) ◽

pp. 133-139

Author(s):

F. F. Komarov ◽

I. E. Mozolevski ◽

V. P. Rogach

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Two Dimensional ◽

Equation Approach ◽

Boltzmann Transport

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Calculation of channeling effects during ion implantation using the Boltzmann transport equation

IEEE Transactions on Electron Devices ◽

10.1109/t-ed.1985.22223 ◽

1985 ◽

Vol 32 (10) ◽

pp. 1918-1924 ◽

Cited By ~ 14

Author(s):

M.D. Giles ◽

J.F. Gibbons

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Boltzmann Transport

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Ion Implantation Calculations in Two Dimensions Using the Boltzmann Transport Equation

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems ◽

10.1109/tcad.1986.1270237 ◽

1986 ◽

Vol 5 (4) ◽

pp. 679-684 ◽

Cited By ~ 13

Author(s):

M.D. Giles

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Two Dimensions ◽

Boltzmann Transport

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Central moments of ion implantation distributions derived by the backward Boltzmann transport equation compared with Monte Carlo simulations

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/25/11/009 ◽

1992 ◽

Vol 25 (11) ◽

pp. 1619-1629 ◽

Cited By ~ 6

Author(s):

M D J Bowyer ◽

D G Ashworth ◽

R Oven

Keyword(s):

Monte Carlo ◽

Ion Implantation ◽

Monte Carlo Simulations ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Boltzmann Transport ◽

Central Moments

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A multiple pass application of the Boltzmann transport equation for calculating ion implantation profiles at low energies

Nuclear Instruments and Methods in Physics Research ◽

10.1016/0167-5087(83)90778-0 ◽

1983 ◽

Vol 209-210 ◽

pp. 33-36 ◽

Cited By ~ 27

Author(s):

M.D. Giles ◽

J.F. Gibbons

Keyword(s):

Ion Implantation ◽

Transport Equation ◽

Boltzmann Transport Equation ◽

Boltzmann Transport ◽

Multiple Pass ◽

Low Energies

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