Ab Initio Molecular Orbital Study of Suppression of Water Absorption and Hydrolysis (F-Removal) of Chemical-Vapor-Deposited SiOF Films by Nitrogen Doping

1997 ◽  
Vol 36 (Part 1, No. 8) ◽  
pp. 5259-5267 ◽  
Author(s):  
Yasushi Nakasaki ◽  
Hideshi Miyajima ◽  
Ryota Katsumata ◽  
Nobuo Hayasaka
1997 ◽  
Vol 36 (Part 1, No. 4B) ◽  
pp. 2533-2544 ◽  
Author(s):  
Yasushi Nakasaki ◽  
Hideshi Miyajima ◽  
Ryota Katsumata ◽  
Nobuo Hayasaka

1997 ◽  
Vol 36 (Part 1, No. 4B) ◽  
pp. 2545-2554 ◽  
Author(s):  
Yasushi Nakasaki ◽  
Hideshi Miyajima ◽  
Ryota Katsumata ◽  
Nobuo Hayasaka

1991 ◽  
Vol 95 (20) ◽  
pp. 7668-7673 ◽  
Author(s):  
Charles W. Bock ◽  
Kerwin D. Dobbs ◽  
Gilbert J. Mains ◽  
Mendel Trachtman

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