Ab Initio Molecular Orbital Study of Suppression of Water Absorption and Hydrolysis (F-Removal) of Chemical-Vapor-Deposited SiOF Films by Nitrogen Doping
1997 ◽
Vol 36
(Part 1, No. 8)
◽
pp. 5259-5267
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Keyword(s):
1997 ◽
Vol 36
(Part 1, No. 4B)
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pp. 2533-2544
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Keyword(s):
1997 ◽
Vol 36
(Part 1, No. 4B)
◽
pp. 2545-2554
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Keyword(s):
1998 ◽
Vol 102
(26)
◽
pp. 5152-5157
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2000 ◽
Vol 325
(4)
◽
pp. 453-456
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2000 ◽
Vol 39
(Part 1, No. 5A)
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pp. 2843-2846
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Keyword(s):
1995 ◽
Vol 60
(26)
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pp. 8375-8381
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1991 ◽
Vol 95
(20)
◽
pp. 7668-7673
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Keyword(s):
1985 ◽
Vol 113
(2)
◽
pp. 145-150
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