Recrystallization of Arsenic Implanted Layer in Silicon by Vacuum-Ultraviolet-Light Irradiation

1996 ◽  
Vol 35 (Part 1, No. 12A) ◽  
pp. 6239-6240
Author(s):  
Yoji Saito ◽  
Hideo Imai ◽  
Yoshihiro Sugita ◽  
Takashi Ito
2008 ◽  
Vol 47 (9) ◽  
pp. 7266-7268
Author(s):  
Yoshinari Maezono ◽  
Yousuke Iwasa ◽  
Makoto Wasamoto ◽  
Ikuo Yamamoto ◽  
Masahito Katto ◽  
...  

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