Fine Particle Inspection Down to 38 nm on Bare Wafer with Micro Roughness by Side-Scattering Light Detection

1993 ◽  
Vol 32 (Part 1, No. 1B) ◽  
pp. 352-357 ◽  
Author(s):  
Minori Noguchi ◽  
Yukio Kembo
2014 ◽  
Author(s):  
Keke Zhang ◽  
Shixuan Liu ◽  
Shizhe Chen ◽  
Yong Qi ◽  
Bin Miao ◽  
...  

Author(s):  
Carl Malings ◽  
Rebecca Tanzer ◽  
Aliaksei Hauryliuk ◽  
Provat K. Saha ◽  
Allen L. Robinson ◽  
...  

2006 ◽  
Author(s):  
W. Heitbrink ◽  
T. Peters ◽  
D. Evans ◽  
T. Slavin

2018 ◽  
Vol 2018 (15) ◽  
pp. 271-1-2714
Author(s):  
Craig Hiller ◽  
Avideh Zakhor
Keyword(s):  

2017 ◽  
Vol 5 (3) ◽  
pp. 20
Author(s):  
JEBISHA J ◽  
MONISHA V ◽  
JEMI B. FEMILA ◽  
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...  

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