High Resolution Electron Holography with Field Emission Electron Microscope

1979 ◽  
Vol 18 (1) ◽  
pp. 9-14 ◽  
Author(s):  
Akira Tonomura ◽  
Tsuyoshi Matsuda ◽  
Junji Endo
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Field Emission ◽  
Electron Holography ◽  
Emission Electron ◽  
Resolution Electron

Development of Field Emission Electron Gun for High Resolution 100KV Electron Microscope

1972 ◽  
Vol 30 ◽  
pp. 430-431 ◽  
Author(s):  
T. Someya ◽  
T. Goto ◽  
Y. Harada ◽  
M. Watanabe
Keyword(s):  
Electron Microscopy ◽  
Electron Microscope ◽  
High Resolution ◽  
Field Emission ◽  
High Resolution Electron Microscopy ◽  
Electron Gun ◽  
Emission Source ◽  
Resolving Power ◽  
Emission Electron ◽  
Resolution Electron

The field emission source is one of the most important factors to improve the image contrast in extremely high resolution electron microscopy since it provides high brightness, very small electron source and low energy spread of electrons. In scanning electron microscopy, although the field emission source has been proved to be advantageous in the range of relatively low accelerating voltages, those capable of operating at higher accelerating voltages are now in great demand in order to improve the resolving power up to 3Å or better. In the present work, we have developed a field emission electron gun which is used with an electron microscope of accelerating voltages up to 100KV.In this development, we first made efforts to improve the method of supplying high voltages in order to eliminate the surge influence on the field emission source which are easily destroyed by a high voltage surge produced by the discharge between electrodes constituting the electron gun.

Design of a Field-Emission Gun for the Phillips CM20/STEM microscope

1990 ◽  
Vol 48 (2) ◽  
pp. 100-101
Author(s):  
P.M. Mul ◽  
B.J.M. Bormans ◽  
L. Schaap
Keyword(s):  
High Resolution ◽  
Field Emission ◽  
Analytical Electron Microscopy ◽  
Emission Region ◽  
Attractive Alternative ◽  
Electron Holography ◽  
Field Emitter ◽  
Field Emitters ◽  
Resolution Electron ◽  
High Resolution Tem

The first Field Emission Guns (FEG) on TEM/STEM instruments were introduced by Philips in 1977. In the past decade these EM400-series microscopes have been very successful, especially in analytical electron microscopy, where the high currents in small probes are particularly suitable. In High Resolution Electron Holography, the high coherence of the FEG has made it possible to approach atomic resolution.Most of these TEM/STEM systems are based on a cold field emitter (CFE). There are, however, a number of disadvantages to CFE’s, because of their very small emission region: the maximum current is limited (a strong disadvantage for high-resolution TEM imaging) and the emission is unstable, requiring special measures to reduce the strong FEG-induced noise. Thermal field emitters (TFE), i.e. a zirconiated field emitter source operating in the thermal or Schottky mode, have been shown to be a viable and attractive alternative to CFE’s. TFE’s have larger emission regions, providing much higher maximum currents, better stability, and reduced sensitivity to vacuum conditions as well as mechanical and electrical interferences.

A Field Emission Electron Microscope

1971 ◽  
Vol 29 ◽  
pp. 6-7
Author(s):  
A. Tonomura ◽  
T. Komoda
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
High Vacuum ◽  
High Resolution Electron Microscopy ◽  
Ultra High Vacuum ◽  
Electron Optics ◽  
Ion Pumps ◽  
High Brightness ◽  
Emission Electron ◽  
Resolution Electron

We have developed a field emission electron microscope. Although field emission gun requires ultra high vacuum and skillful technique, it brings about the favorable characteristics of high brightness and small energy spread. This characteristics will enable a significant progress in coherent electron optics and high resolution electron microscopy, especially in electron beam holography.Its column is Hitachi HU-11C Electron Microscope modified for ultra high vacuum operation, and it is evacuated with five ion pumps. Field emission gun is divided into two parts and is evacuated differentially with two ion pumps and a sublimation pump. The final pressures in these rooms are 5x10-10 Torr and 5x10-8 Torr respectively.

scholarly journals Electron Holography by Field Emission Electron Microscope

1980 ◽  
Vol 22 (3) ◽  
pp. 263-269 ◽  
Author(s):  
Akira TONOMURA ◽  
Tsuyoshi MATSUDA ◽  
Junji ENDO
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Electron Holography ◽  
Emission Electron

Off-axis electron holography by field emission electron microscope

1978 ◽  
Vol 36 (1) ◽  
pp. 224-225
Author(s):  
A. Tonomura ◽  
T. Matsuda ◽  
T. Komoda
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
Electron Source ◽  
Electron Gun ◽  
Electron Holography ◽  
One Dimensional ◽  
Interference Fringes ◽  
Emission Electron ◽  
Electric Supply ◽  
Optical Laser

Although the feasibility of electron holography has been verified by several authors, it has not yet been put to practical use. This is because of the lack of a coherent electron source, such as optical laser. In practice, the number of interference fringes produced with a biprism is 200 at most, the exception being one dimensional cases. Off-axis holography requires 5,000∼100,000 interference fringes. Therefore, the useful application of electron holography in higher resolution and phase contrast electron microscopy hinges on development of a coherent electron source capable of producing 5,000 fringes or more.To realize a coherent electron source, a 100 kV field emission electron gun was developed and attached to an electron microscope. In designing the microscope,special care was taken in the column and electric supply. This was done to minimize movement of the small beam spot, which is easily disturbed from outside, so as to maintain the field emission electron beam.

The influence of the objective lens current in low magnification electron holography

1995 ◽  
Vol 53 ◽  
pp. 614-615
Author(s):  
B.G. Frost ◽  
D.C. Joy ◽  
E. Völkl ◽  
L.F. Allard
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Field Emission ◽  
Focal Plane ◽  
Reference Wave ◽  
Object Wave ◽  
Objective Lens ◽  
Electron Holography ◽  
Emission Electron

In order to align an electron microscope for low magnification holography we usually completely switch off the objective lens and image the sample by the first intermediate lens. In addition, to achieve a highly coherent electron beam we highly excite the condensor lens resulting in a divergent illumination of the sample and the intermediate lens. Now negatively biasing the fiber of a Möllenstedt type biprism placed between the first an second intermediate lenses of our Hitachi HF-2000 field emission electron microscope creates two virtual sources below the back focal plane of the first intermediate lens. These two sources are necessary to form off-axis holograms. Slightly exciting the objective lens and still imaging the sample by the first intermediate lens results in two major changes in our holograms.First: Due to an electron beam less divergent or even convergent illuminating the first intermediate lens when exciting the objective lens (compare Fig. 1 to Fig.2) the angle β at which object wave and reference wave are superimposed decreases.

Development of 350-KV holography electron microscope equipped with magnetic type field-emission electron gun

1989 ◽  
Vol 47 ◽  
pp. 104-105
Author(s):  
J. Endo ◽  
T. Kawasaki ◽  
T. Masuda ◽  
A. Tonomura
Keyword(s):  
Electron Microscope ◽  
Field Emission ◽  
High Sensitivity ◽  
Beam Current ◽  
Electron Gun ◽  
Electron Holography ◽  
Electron Microscopic ◽  
Magnetic Lens ◽  
High Brightness ◽  
Emission Electron

A field-emission electron gun is one of the most epoch-making technologies in an electron microscopic world. In a transmission electron microscope, a high brightness of this beam has been effectively employed for electron-holographic measurements, though the value is not still high enough. Development of a higher brightness beam will promise to open up unattained application possibilities of electron holography such as high resolution and high sensitivity interferometry.We developed the field emission electron microscope for electron holographic applications. Special attentions were paid for high brightness, large beam current and easy operation. Figure 1 is a schematic diagram of the electron gun. In order not to deteriorate the original high-brightness feature of the beam by the aberrations in the gun and the condenser lenses, a magnetic lens was installed between the tip and the extraction anode so that the total aberration effect might be minimized. Field emitted electron beam is converged by the magnetic and the electrostatic lenses, and accelerated in a ten-stage accelerator which is made of porcelain.

An Analysis of Dissociation of Molecules in a High Resolution Electron Microscope

1973 ◽  
Vol 31 ◽  
pp. 486-487
Author(s):  
Mihir Parikh
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Cross Sections ◽  
Resolving Power ◽  
Peak Intensity ◽  
Molecular Film ◽  
Resolution Electron ◽  
Dissociation Cross Section ◽  
High Resolution Electron Microscope ◽  
The Stability

It is well known that the resolution of bio-molecules in a high resolution electron microscope depends not just on the physical resolving power of the instrument, but also on the stability of these molecules under the electron beam. Experimentally, the damage to the bio-molecules is commo ly monitored by the decrease in the intensity of the diffraction pattern, or more quantitatively by the decrease in the peaks of an energy loss spectrum. In the latter case the exposure, EC, to decrease the peak intensity from IO to I’O can be related to the molecular dissociation cross-section, σD, by EC = ℓn(IO /I’O) /ℓD. Qu ntitative data on damage cross-sections are just being reported, However, the microscopist needs to know the explicit dependence of damage on: (1) the molecular properties, (2) the density and characteristics of the molecular film and that of the support film, if any, (3) the temperature of the molecular film and (4) certain characteristics of the electron microscope used

Field Emission SEM Equipped With Noise Compensator

1973 ◽  
Vol 31 ◽  
pp. 302-303
Author(s):  
S. Saito ◽  
H. Todokoro ◽  
S. Nomura ◽  
T. Komoda
Keyword(s):  
Electron Microscope ◽  
High Resolution ◽  
Scanning Electron Microscope ◽  
Field Emission ◽  
Low Contrast ◽  
Probe Current ◽  
High Resolution Images ◽  
Scanning Electron

Field emission scanning electron microscope (FESEM) features extremely high resolution images, and offers many valuable information. But, for a specimen which gives low contrast images, lateral stripes appear in images. These stripes are resulted from signal fluctuations caused by probe current noises. In order to obtain good images without stripes, the fluctuations should be less than 1%, especially for low contrast images. For this purpose, the authors realized a noise compensator, and applied this to the FESEM.Fig. 1 shows an outline of FESEM equipped with a noise compensator. Two apertures are provided gust under the field emission gun.

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