Thermal modeling of CMOS (complementary metal-oxide semiconductor) temperature and (or) flow microsensors
Keyword(s):
The Past
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In the past few years, it has become possible to construct CMOS (complementary metal-oxide semiconductor) microstructures suitable for temperature and (or) flow sensing applications. We present numerical modeling results for such structures, and discuss the effect several parameters have on the performance of such sensors.
2002 ◽
Vol 41
(Part 2, No. 8B)
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pp. L919-L921
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2011 ◽
pp. n/a-n/a
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1998 ◽
Vol 37
(Part 1, No. 3B)
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pp. 1050-1053
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