Effet d'une pulvérisation de l'antimoine dans le a-Si: H
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Cathode-sputtering of antimony in a-Si:H yields an amorphous film more conductive than intrinsic a-Si:H. A rapid annealing of the film allows us to increase its conductivity and to observe a dehydrogenation by infrared absorption measurements and by the elastic recoil detection technique. The latter method also gave us a precise analysis of the chemical composition of the amorphous film.[Journal translation]
1990 ◽
Vol 48
(1-4)
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pp. 478-481
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1990 ◽
pp. 88-109
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1983 ◽
Vol 218
(1-3)
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pp. 598-600
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1983 ◽
Vol 218
(1-3)
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pp. 601-606
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2006 ◽
Vol 249
(1-2)
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pp. 370-373
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1985 ◽
Vol 27
(7)
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pp. 584-590
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