All-optical, silicon based, fiber optic modulator using a near cutoff region

1989 ◽  
Vol 67 (4) ◽  
pp. 412-419 ◽  
Author(s):  
R. Normandin ◽  
D. C. Houghton ◽  
M. Simard-Normandin

We demonstrate, using molecular beam epitaxy and chemical vapour deposition grown silicon thin films, an all-optical modulator for single-mode guided light at 1.32 μm. A control beam of above band-gap light is used to generate electron–hole pairs via inter-band absorption and the resultant lowering of the effective refractive index brings the waveguide to cutoff thus limiting throughput. Near 100% modulation is obtained with less than 150 pJ energies with subnanosecond initiation and recovery times. The operation is stable and is polarization and wavelength independent in a three port geometry suitable for use as a logic gate. To reduce the total energy required to bring the waveguide to cutoff, the effects of using a small, already near cutoff and leaky region at the interaction region is investigated here. Preliminary measurements on a graded index, leaky mode, chemical vapour deposition sample resulted in a reduction by a factor of five or better in drive energy. By keeping the leaky region short, the losses can be kept to negligible values. Results in time resolved imaging of the guided mode are also presented along with the necessary design considerations for performance compatible with presently available communication solid state laser sources.

2020 ◽  
Author(s):  
Polla Rouf ◽  
Pitsiri Sukkaew ◽  
Lars Ojamäe ◽  
Henrik Pedersen

<p>Aluminium nitride (AlN) is a semiconductor with a wide range of applications from light emitting diodes to high frequency transistors. Electronic grade AlN is routinely deposited at 1000 °C by chemical vapour deposition (CVD) using trimethylaluminium (TMA) and NH<sub>3</sub> while low temperature CVD routes to high quality AlN are scarce and suffer from high levels of carbon impurities in the film. We report on an ALD-like CVD approach with time-resolved precursor supply where thermally induced desorption of methyl groups from the AlN surface is enhanced by the addition of an extra pulse, H<sub>2</sub>, N<sub>2</sub> or Ar between the TMA and NH<sub>3</sub> pulses. The enhanced desorption allowed deposition of AlN films with carbon content of 1 at. % at 480 °C. Kinetic- and quantum chemical modelling suggest that the extra pulse between TMA and NH<sub>3</sub> prevents re-adsorption of desorbing methyl groups terminating the AlN surface after the TMA pulse. </p>


2020 ◽  
Author(s):  
Polla Rouf ◽  
Pitsiri Sukkaew ◽  
Adam Hultqvist ◽  
Tobias Törndahl ◽  
Lars Ojamäe ◽  
...  

Aluminium nitride (AlN) is a semiconductor with a wide range of applications from light emitting diodes to high frequency transistors. Electronic grade AlN is routinely deposited at 1000 °C by chemical vapour deposition (CVD) using trimethylaluminium (TMA) and NH<sub>3</sub> while low temperature CVD routes to high quality AlN are scares and suffer from high levels of carbon impurities in the film. We report on an ALD-like CVD approach with time-resolved precursor supply where thermally induced desorption of methyl groups from the AlN surface is enhanced by the addition of an extra pulse, H<sub>2</sub>, N<sub>2</sub> or Ar between the TMA and NH<sub>3</sub> pulses. The enhanced desorption allowed deposition of AlN films with carbon content of 1 at. % at 480 °C. Mass spectrometry combined with kinetic- and quantum chemical modelling show that the extra pulse between TMA and NH<sub>3</sub> enhances the desorption and prevents re-adsorption of the methyl groups, terminating the AlN surface after the TMA pulse. The surface methyl groups are found to desorb as CH<sub>3</sub>, CH<sub>4</sub> and C<sub>2</sub>H<sub>x</sub>.


Sign in / Sign up

Export Citation Format

Share Document