Nondestructive surface analysis by nuclear scattering techniques

1987 ◽  
Vol 65 (8) ◽  
pp. 950-955 ◽  
Author(s):  
S. C. Gujrathi ◽  
P. Aubry ◽  
L. Lemay ◽  
J. -P. Martin
Keyword(s):  
Surface Analysis ◽  
Nuclear Physics ◽  
Ion Beam ◽  
Heavy Ion ◽  
Rutherford Backscattering ◽  
Nuclear Scattering ◽  
Elastic Recoil ◽  
Accelerator Facility ◽  
Elastic Recoil Detection ◽  
The Masses

An elastic-recoil detection (ERD) technique is developed and successfully applied in the simultaneous, nondestructive multielement depth-profile studies of thin films with thicknesses up to 2 μm, used in various material technologies. In this technique, the light elements are knocked out of the target by using an energetic heavy-ion beam obtained from the Tandom Accelerator Facility of the Nuclear Physics Laboratory. A time-of-flight method is used to separate the masses and the energies of the recoiled elements as well as the Rutherford backscattering incident ions. Using 30 MeV35Cl as the beam probe, we get an observed surface resolution of better than 100 Å at a 30° detection angle. Typical mass resolutions for energies >5 MeV are 0.2 amu in the C region and 0.7 amu in the Si region. The factors related to the mass and depth resolutions, probing depth, and approximate detection limit are systematically studied using 19F, 35Cl, and 79Br as incident beams. This newly developed ERD method, along with the already existing Rutherford backscattering (RBS) technique, makes the Nuclear Scattering Facility at the Université de Montréal unique for surface analysis.

scholarly journals Appied Nuclear Physics-Advanced Ion Beam Materials Analysis at small Accelerators

2020 ◽  
Vol 13 ◽  
pp. 43
Author(s):  
R. Grötzschel ◽  
U. Kreissig ◽  
Ch. Neelmeijer
Keyword(s):  
Thin Film ◽  
Nuclear Physics ◽  
Large Scale ◽  
Ion Beam ◽  
Depth Resolution ◽  
Heavy Ion ◽  
Thin Layers ◽  
Wide Energy Range ◽  
Elastic Recoil ◽  
Novel Technologies

The ossendorf Ion Beam Laboratory has been developed to an international large scale user facility in the field of ion beam physics and ion beam materials research. The laboratory operates a large number of modern experimental equipment at three MeV accelerators, three implanters, an ECR source and a FIB which together pro- vide almost all ions species in a wide energy range from a few hundred eV to a few ten MeV. Also IBAD and PHI devices were installed for various purposes. The re- search stations at the accelerators are supplemented by complementary techniques like TEM, SEM, AUGER, AFM etc., all contributing useful information to thin film investigations. In this paper a short overview of the laboratory is given and a few recent experiments and their results are shown. Rutherford Backscattering Spec- trometry ( RBS) and Elastic Recoil Detection Analysis (ERDA) are well established techniques for quantitative thin film. The advantage of these methods consists in the simple physics they are basing on, namely the stopping of energetic ions in matter and the binary scattering of at the Coulomb potential of atomic nuclei. The increasing importance of ultra-thin layers for novel technologies demands quantita- tive analysis techniques with a depth resolution of atomic monolayers, which can be obtained for RBS and ERDA by magnetic spectrometers only. The magnetic spec- trometers we have installed at the 3 MV Tandetron and at the 5 MV tandem are described , recent applications are shown and a few problems to achieve high depth resolution will be discussed. Heavy ion detectors as Bragg IC, dE-Erest-telescopes and ToF spectrometers, developed for nuclear physics experiments, are now applied for ERDA, providing an efficient analysis of thin films containing light elements. The lateral position resolution of such detectors enables kinematic corrections and allows large solid angles. Thus by ERDA in situ studies during surface modification processes are possible like in the case of the nitridation of aluminum and stainless steel. At the external beam mainly objects of fine arts or of historical value are analysed. It will be shown, how the complementary application of PIXE, RBS and PIGE can help to detect the beginning corrosion of mediaeval glass objects.

Extended Damage Depth Determinations in AR- and H-Implanted Silica Glass

1993 ◽  
Vol 316 ◽  
Author(s):  
G.W. Arnold ◽  
G. Battaglin ◽  
P. Mazzoldi
Keyword(s):  
Silica Glass ◽  
Ion Beam ◽  
Fused Silica ◽  
Rutherford Backscattering ◽  
High Fluence ◽  
Elastic Recoil ◽  
Ion Beam Analysis ◽  
Elastic Recoil Detection ◽  
Beam Analysis ◽  
Damage Depth

ABSTRACTDamage depths for Ar-implanted fused silica have been examined by Rutherford backscattering (RBS) and elastic recoil detection (ERD) ion-beam analysis. H incursion (6 at. %) from ambient atmospheres to twice TRIM values was found for damage depths which intersected the surface. H implants were used to decorate Ar damage for deeper Ar implants. The incursion of H for high-fluence implants is important for optoelectronic applications.

scholarly journals High energy density physics research at IMP, Lanzhou, China

2014 ◽  
Vol 2 ◽  
Author(s):  
Yongtao Zhao ◽  
Rui Cheng ◽  
Yuyu Wang ◽  
Xianming Zhou ◽  
Yu Lei ◽  
...  
Keyword(s):  
Energy Density ◽  
Ion Beam ◽  
Heavy Ion ◽  
High Energy ◽  
High Energy Density ◽  
Accelerator Facility ◽  
High Energy Density Physics ◽  
Research Activities ◽  
Modern Physics ◽  
Heavy Ion Beam

Abstract Recent research activities relevant to high energy density physics (HEDP) driven by the heavy ion beam at the Institute of Modern Physics, Chinese Academy of Sciences are presented. Radiography of static objects with the fast extracted high energy carbon ion beam from the Cooling Storage Ring is discussed. Investigation of the low energy heavy ion beam and plasma interaction is reported. With HEDP research as one of the main goals, the project HIAF (High Intensity heavy-ion Accelerator Facility), proposed by the Institute of Modern Physics as the 12th five-year-plan of China, is introduced.

scholarly journals APAPES - Atomic Physics with Accelerators: Projectile Electron Spectroscopy

2019 ◽  
Vol 21 ◽  
pp. 153
Author(s):  
I. Madesis ◽  
A. Lagoyannis ◽  
M. Axiotis ◽  
T. J. Mertzimekis ◽  
M. Andrianis ◽  
...  
Keyword(s):  
Atomic Physics ◽  
Nuclear Physics ◽  
Strong Field ◽  
Ion Beam ◽  
Strong Support ◽  
Heavy Ion ◽  
Collision Dynamics ◽  
Atomic Collisions ◽  
Zero Degree ◽  
Gas Targets

The only existing heavy-ion accelerator in Greece, the 5.5 MV TANDEM at the National Research Center “Demokritos” in Athens has been used to date primarily for investigations centering around nuclear physics. Here, we propose to establish the new (for Greece) discipline of Atomic Physics with Accelerators, a strong field in the EU with important contributions to fusion, hot plasmas, astrophysics, accelerator technology and basic atomic physics of ion-atom collision dynamics, structure and technology. This will be accomplished by combining the existing interdisciplinary atomic collisions expertise from three Greek universities, the strong support of distinguished foreign researchers and the high technical ion-beam know-how of the TANDEM group into a cohesive initiative.Using the technique of Zero-degree Auger Projectile Spectroscopy (ZAPS), we shall complete a much needed systematic isoelectronic investigation of K-Auger spectra emitted from collisions of pre-excited ions with gas targets using novel techniques. Our results are expected to lead to a deeper understanding of the neglected importance of cascade feeding of metastable states [1] in collisions of ions with gas targets and further elucidate their role in the non-statistical production of excited three-electron states by electron capture, recently a field of conflicting interpretations awaiting further resolution.

Sign in / Sign up

Export Citation Format

Share Document