Influence of the Carrier Gas Composition on Metalorganic Vapor Phase Epitaxy of Gallium Nitride

2005 ◽  
Vol 31 (4) ◽  
pp. 293 ◽  
Author(s):  
W. V. Lundin
Keyword(s):  
Gallium Nitride ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Gas Composition ◽  
Carrier Gas

Metalorganic vapor phase epitaxy growth of ZnSe films using argon carrier gas

1992 ◽  
Vol 117 (1-4) ◽  
pp. 102-106 ◽  
Author(s):  
A. Ohki ◽  
Y. Kawaguchi ◽  
K. Ando ◽  
S. Zembutsu
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carrier Gas

Nitrogen as carrier gas for the growth of ZnSe and ZnSe:N in plasma enhanced metalorganic vapor phase epitaxy

1997 ◽  
Vol 170 (1-4) ◽  
pp. 491-496 ◽  
Author(s):  
W. Taudt ◽  
A. Hardt ◽  
S. Lampe ◽  
H. Hamadeh ◽  
M. Heuken
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carrier Gas

Fundamental models of the metalorganic vapor-phase epitaxy of gallium nitride and their use in reactor design

2000 ◽  
Vol 221 (1-4) ◽  
pp. 622-628 ◽  
Author(s):  
R.P Pawlowski ◽  
C Theodoropoulos ◽  
A.G Salinger ◽  
T.J Mountziaris ◽  
H.K Moffat ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Vapor Phase ◽  
Reactor Design ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

Reduction of Residual Impurities in Homoepitaxial m -Plane (101¯0) GaN by Using N2 Carrier Gas in Metalorganic Vapor Phase Epitaxy

2018 ◽  
Vol 12 (8) ◽  
pp. 1800124
Author(s):  
Ousmane I Barry ◽  
Kaddour Lekhal ◽  
Si-Young Bae ◽  
Ho-Jun Lee ◽  
Markus Pristovsek ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Carrier Gas ◽  
Residual Impurities
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