Two-dimensional plasma density distributions in low-pressure gas discharges
Keyword(s):
2011 ◽
Vol 39
(11)
◽
pp. 2536-2537
◽
Keyword(s):
1990 ◽
pp. 89-107
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Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
1994 ◽
Vol 12
(1)
◽
pp. 461
◽
Keyword(s):
Keyword(s):
1990 ◽
Vol 56
(524)
◽
pp. 892-897
Keyword(s):