Transmission electron microscope study of polyphase and discordant monazites: Site-specific specimen preparation using the focused ion beam technique

Geology ◽  
2003 ◽  
Vol 31 (11) ◽  
pp. 973 ◽  
Author(s):  
Anne-Magali Seydoux-Guillaume ◽  
Philippe Goncalves ◽  
Richard Wirth ◽  
Alexander Deutsch
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Electron Microscope Study ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Site Specific ◽  
Transmission Electron ◽  
Transmission Electron Microscope Study ◽  
Beam Technique

The Effect of Focused Ion Beam (Fib) Specimen Geometry on X-Ray Fluorescence During Energy Dispersive X-Ray Spectroscopy (EDS) Analysis in the Transmission Electron Microscope (TEM)

1998 ◽  
Vol 4 (S2) ◽  
pp. 856-857
Author(s):  
David M. Longo ◽  
James M. Howe ◽  
William C. Johnson
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Focused Ion Beam ◽  
Materials Science ◽  
Bulk Material ◽  
Ion Beam ◽  
Energy Dispersive ◽  
Specimen Preparation ◽  
X Ray ◽  
Transmission Electron

The focused ion beam (FIB) has become an indispensable tool for a variety of applications in materials science, including that of specimen preparation for the transmission electron microscope (TEM). Several FIB specimen preparation techniques have been developed, but some problems result when FIB specimens are analyzed in the TEM. One of these is X-ray fluorescence from bulk material surrounding the thin membrane in FIB-prepared samples. This paper reports on a new FIB specimen preparation method which was devised for the reduction of X-ray fluorescence during energy dispersive X-ray spectroscopy (EDS) in the TEM.Figure 1 shows three membrane geometries that were investigated in this study on a single-crystal Si substrate with a RF sputter-deposited 50 nm Ni film. Membrane 1 is the most commonly reported geometry in the literature, with an approximately 20 urn wide trench and a membrane having a single wedge with a 1.5° incline.

Focused ion beam technique and transmission electron microscope studies of microdiamonds from the Saxonian Erzgebirge, Germany

2003 ◽  
Vol 210 (3-4) ◽  
pp. 399-410 ◽  
Author(s):  
Larissa F. Dobrzhinetskaya ◽  
Harry W. Green ◽  
Matthew Weschler ◽  
Mark Darus ◽  
Young-Chung Wang ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Transmission Electron ◽  
Beam Technique

Site-specific Transmission Electron Microscope Characterization of Micrometer-sized Particles Using the Focused Ion Beam Lift-out Technique

2001 ◽  
Vol 7 (5) ◽  
pp. 418-423
Author(s):  
Janice K. Lomness ◽  
Lucille A. Giannuzzi ◽  
Michael D. Hampton
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specific Region ◽  
High Quality ◽  
Site Specific ◽  
Transmission Electron ◽  
A Site

AbstractMicrometer sized particles have been studied to show that a high-quality transmission electron microscope (TEM) specimen can be produced, without the use of embedding media, from a site-specific region of chosen particles using the focused ion beam (FIB) lift-out (LO) technique. The uniqueness of this technique is that site-specific TEM LO specimens may be obtained from particles and from regions which are smaller than the conventional ∼10–20 μm × 5 μm × ∼0.1 μm dimensions of the LO specimen. The innovative FIB LO procedures are described in detail and TEM images of electron transparent specimens obtained from specific micrometer-sized particles are presented.

A FIB Micro-Sampling Technique and a Site-Specific TEM Specimen Preparation Method for Precision Materials Characterization

2000 ◽  
Vol 636 ◽  
Author(s):  
Toshie Yaguchi ◽  
Ryoichi Urao ◽  
Takeo Kamino ◽  
Tsuyoshi Ohnishi ◽  
Takahito Hashimoto ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Ion Beam ◽  
Thin Foil ◽  
Specimen Preparation ◽  
Deep Trench ◽  
Site Specific ◽  
Area Of Interest ◽  
Specimen Holder ◽  
Transmission Electron

AbstractA technique to cut out small pieces of samples directly from chips or wafer samples in a focused ion beam (FIB) system has been developed. A deep trench is FIB milled to cut out a small, wedge-shaped portion of the sample from the area of interest A micromanipulator with tungsten (W) probe is employed for lifting the micro-sample. The lifted micro-sample is then mounted on a carrier to prepare electron transparent thin foil specimens for transmission electron microscope (TEM) observation. We have also developed a method for site-specific TEM specimen preparation. In this method, FIB system and TEM/scanning transmission electron microscope (STEM) equipped with secondary electron (SE) detector are employed. An FIB–TEM/STEM compatible specimen holder has also been developed so that a specimen can be milled in the FIB system and observed in a TEM/STEM without remounting the specimen. STEM and scanning electron microscopy (SEM) images are used for locating a specific site on a specimen. SEM image observation at an accelerating voltage of 200kV enabled us to observe not only surface structures but also inner structures near the surface of a cross section with depth of field of around 1 micrometer. The STEM image allows the observation of inner structures of 3-5 micrometer thick specimens. Milling of a specimen by FIB and observation of the milled sample by SEM and STEM are alternately carried out until an electron transparent thin foil specimen is obtained. The position accuracy of the method in TEM specimen preparation is approximately 100nm.

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