scholarly journals Giant nonreciprocity of surface acoustic waves enabled by the magnetoelastic interaction

2020 ◽  
Vol 6 (49) ◽  
pp. eabc5648
Author(s):  
Piyush J. Shah ◽  
Derek A. Bas ◽  
Ivan Lisenkov ◽  
Alexei Matyushov ◽  
Nian X. Sun ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
State Of The Art ◽  
Surface Acoustic Waves ◽  
Power Reduction ◽  
Wave System ◽  
Physical Systems ◽  
Current State ◽  
Saw Devices ◽  
Communications Technologies ◽  
Microwave Communications

Nonreciprocity, the defining characteristic of isolators, circulators, and a wealth of other applications in radio/microwave communications technologies, is generally difficult to achieve as most physical systems incorporate symmetries that prevent the effect. In particular, acoustic waves are an important medium for information transport, but they are inherently symmetric in time. In this work, we report giant nonreciprocity in the transmission of surface acoustic waves (SAWs) on lithium niobate substrate coated with ferromagnet/insulator/ferromagnet (FeGaB/Al2O3/FeGaB) multilayer structure. We exploit this structure with a unique asymmetric band diagram and expand on magnetoelastic coupling theory to show how the magnetic bands couple with acoustic waves only in a single direction. We measure 48.4-dB (power ratio of 1:69,200) isolation that outperforms current state-of-the-art microwave isolator devices in a previously unidentified acoustic wave system that facilitates unprecedented size, weight, and power reduction. In addition, these results offer a promising platform to study nonreciprocal SAW devices.

Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

1975 ◽  
Vol 33 ◽  
pp. 86-87
Author(s):  
Kemining W. Yeh ◽  
Richard S. Muller ◽  
Wei-Kuo Wu ◽  
Jack Washburn
Keyword(s):  
Integrated Circuit ◽  
Acoustic Waves ◽  
New Technology ◽  
Surface Acoustic Waves ◽  
Electromechanical Properties ◽  
Leading Role ◽  
Saw Devices ◽  
Transmission Electron ◽  
High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

scholarly journals Nanostructure-Enhanced Surface Acoustic Waves Biosensor and Its Computational Modeling

2009 ◽  
Vol 2009 ◽  
pp. 1-11 ◽  
Author(s):  
Guigen Zhang
Keyword(s):  
Acoustic Waves ◽  
High Performance ◽  
Surface Acoustic Waves ◽  
Active Surface ◽  
Underlying Mechanism ◽  
Saw Sensor ◽  
Saw Devices ◽  
Operational Capabilities ◽  
Sensing Platform ◽  
Enhanced Surface

Surface acoustic wave (SAW) devices are considered to be very promising in providing a high-performance sensing platform with wireless and remote operational capabilities. In this review, the basic principles of SAW devices and Love-mode SAW-based biosensors are discussed first to illustrate the need for surface enhancement for the active area of a SAW sensor. Then some of the recent efforts made to incorporate nanostructures into SAW sensors are summarized. After that, a computational approach to elucidate the underlying mechanism for the operations of a Love-mode SAW biosensor with nanostructured active surface is discussed. Finally, a modeling example for a Love-mode SAW sensor with skyscraper nanopillars added to in its active surface along with some selected results is presented.

scholarly journals Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4630
Author(s):  
Florian Bartoli ◽  
Jérémy Streque ◽  
Jaafar Ghanbaja ◽  
Philippe Pigeat ◽  
Pascal Boulet ◽  
...  
Keyword(s):  
Acoustic Waves ◽  
Electromechanical Coupling ◽  
Surface Acoustic Waves ◽  
Electromechanical Coupling Coefficient ◽  
X Ray Diffraction ◽  
Plasma Parameters ◽  
Sapphire Substrates ◽  
Saw Devices ◽  
Transmission Electron ◽  
Electrical Characterizations

Scandium aluminum nitride (ScxAl1-xN) films are currently intensively studied for surface acoustic waves (SAW) filters and sensors applications, because of the excellent tradeoff they present between high SAW velocity, large piezoelectric properties and wide bandgap for the intermediate compositions with an Sc content between 10 and 20%. In this paper, the growth of Sc0.09Al0.91N and Sc0.18Al0.82N films on sapphire substrates by sputtering method is investigated. The plasma parameters were optimized, according to the film composition, in order to obtain highly-oriented films. X-ray diffraction rocking-curve measurements show a full width at half maximum below 1.5°. Moreover, high-resolution transmission electron microscopy investigations reveal the epitaxial nature of the growth. Electrical characterizations of the Sc0.09Al0.91N/sapphire-based SAW devices show three identified modes. Numerical investigations demonstrate that the intermediate compositions between 10 and 20% of scandium allow for the achievement of SAW devices with an electromechanical coupling coefficient up to 2%, provided the film is combined with electrodes constituted by a metal with a high density.

Harmonic Excitation of Surface Acoustic Waves on Gallium Nitride Thin Films for Biological and Chemical Sensor Applications

2012 ◽  
Vol 1415 ◽  
Author(s):  
J. Justice ◽  
L. E. Rodak ◽  
K. Lee ◽  
L. A. Hornak ◽  
D. Korakakis
Keyword(s):  
Thin Films ◽  
Gallium Nitride ◽  
Acoustic Waves ◽  
Chemical Sensor ◽  
Surface Acoustic Waves ◽  
Cost Effective ◽  
Harmonic Excitation ◽  
Higher Harmonics ◽  
Sensor Applications ◽  
Saw Devices

ABSTRACTGallium nitride (GaN) is a robust piezoelectric semiconductor with excellent thermal and chemical stability, making it an attractive material for surface acoustic wave (SAW) sensors operating in high temperature and harsh environments. The sensitivity of SAW devices is proportional to the square of the operating frequency. Therefore, high operating frequencies into the GHz regime are desirable for SAW sensors. For GaN, this requires sub-micron interdigital transducers (IDTs) when devices are designed to operate at the fundamental Rayleigh mode frequency. The necessity for sub-micron IDTs can increase fabrication costs and complexity. By designing SAW devices to operate at harmonic frequencies, GHz operation can be realized with relatively large IDTs, resulting in simpler and more cost effective solutions for GaN based SAW sensors. Devices have previously been designed to operate at the 5th and higher harmonics on lithium niobate, but there are no reports of using this technique on GaN in the literature. In this study, GaN thin films have been grown via metal organic vapor phase epitaxy on sapphire substrates. SAW devices designed to operate at the fundamental frequency and higher harmonics have been fabricated and measured. Operating frequencies greater than 2 GHz have been achieved using IDTs with 5 μm fingers. In addition, reduction of electromagnetic feedthrough around the 5th and 7th harmonic is demonstrated through varying ground electrode geometries.

scholarly journals Effect of Partial Ba Substitutions on the Crystallization of Sr2TiSi2O8 (STS) Glass–Ceramics and on the Generation of a SAW Signal at High Temperatures

Materials ◽  
2021 ◽  
Vol 14 (16) ◽  
pp. 4648
Author(s):  
Maurice Gonon ◽  
Florian Dupla ◽  
Hassan Alhousseini ◽  
Marc Duquennoy ◽  
Nikolay Smagin ◽  
...  
Keyword(s):  
High Temperatures ◽  
Glass Ceramic ◽  
Acoustic Waves ◽  
High Stability ◽  
Surface Acoustic Waves ◽  
Glass Ceramics ◽  
Preferential Orientation ◽  
Ceramic Substrates ◽  
Saw Devices ◽  
Ba Substitution

Because of their characteristics, including a d33 of 10–15 pC/N and high stability up to temperatures over 1000 °C, polar glass–ceramics containing fresnoite crystals can be regarded as highly effective materials for applications requiring piezoelectricity at high temperatures. In the present paper we investigate barium substitutions in an Sr-fresnoite (STS) glass–ceramic. Two aspects are studied: first, the effect of the substitution on the preferential orientation of the crystallization, and second, the ability of the glass–ceramics to generate and propagate surface acoustic waves (SAW) at high temperatures. XRD analyses show that a 10 at.% substitution of Ba allows us to keep a strong preferential orientation of the (00l) planes of the fresnoite crystals down to more than 1 mm below the surfaces. Higher substitution levels (25 and 50 at.%), induce a non-oriented volume crystallization mechanism that competes with the surface mechanism. SAW devices were fabricated from glass–ceramic substrates with 0, 10 and 25 at.% Ba substitutions. Temperature testing reveals the high stability of the frequency and delay for all of these devices. The glass–ceramic with a 10 at.% Ba substitution gives the strongest amplitude of the SAW signal. This is attributed to the high (00l) preferential orientation and the absence of disoriented volume crystallization.

Analysis of Surface Acoustic Waves in Layered Piezoelectric Media and its Applications to the Design of Saw Devices

2003 ◽  
Vol 19 (1) ◽  
pp. 225-232 ◽  
Author(s):  
T.-T. Wu ◽  
Y.-Y. Chen
Keyword(s):  
Acoustic Waves ◽  
Velocity Dispersion ◽  
Metal Layer ◽  
Effective Permittivity ◽  
Surface Acoustic Waves ◽  
Frequency Bandwidth ◽  
Piezoelectric Media ◽  
Saw Devices ◽  
Phase Velocity Dispersion

ABSTRACTIn this paper, we utilized a Stroh based formulation for solving problems of surface waves in layered piezoelectric media, and then, applied it to analyze surface acoustic wave (SAW) devices. The determination of the optimal cut of a piezoelectric crystal and the choice of the best propagation of SAW devices were given. The dispersion induced by a thin metal layer on SAW propagation in a SAW device was analyzed and discussed. Finally, we applied the formulation to calculate the effective permittivity and phase velocity dispersion of a LiNbO3/Diamond layered SAW device. Both of the null frequency bandwidth and the insertion loss of the dispersive SAW device were obtained.

State of the art in wireless sensing with surface acoustic waves

2001 ◽  
Vol 48 (2) ◽  
pp. 265-271 ◽  
Author(s):  
W.-E. Bulst ◽  
G. Fischerauer ◽  
L. Reindl
Keyword(s):  
Acoustic Waves ◽  
State Of The Art ◽  
Surface Acoustic Waves ◽  
Wireless Sensing

Integrated ZnO Film Based Acoustic Wave Microfluidics and Biosensors

2010 ◽  
Vol 67 ◽  
pp. 49-58 ◽  
Author(s):  
Jack K. Luo ◽  
Y.Q. Fu ◽  
Greg Ashley ◽  
Williams I. Milne
Keyword(s):  
Acoustic Wave ◽  
Acoustic Waves ◽  
Low Cost ◽  
Surface Acoustic Waves ◽  
Acoustic Streaming ◽  
Film Surface ◽  
High Sensitivity ◽  
Zno Film ◽  
Actuation Mechanism ◽  
Saw Devices

Lab-on-a-chip (LOC) is one of the most important microsystems with promising applications in microanalysis, drug development and diagnosis, etc. We have been developing a LOC biodetection system using acoustic wave as a single actuation mechanism for both microfluidics and biosensing using low cost piezoelectric ZnO film. Surface acoustic waves (SAW) coupled into the liquid will induce acoustic streaming, or move the droplet on the surface. These have been utilized to make SAW-based micropumps and micromixers which are simple in structure, easy to fabricate, low cost, reliable and efficient. SAW devices and thin film bulk acoustic resonators (FBAR) have been fabricated on nanocrystalline ZnO thin films deposited using sputtering on Si substrates. A streaming velocity up to ~5cm/s within a microdroplet and a droplet moving speed of ~1cm/s have been achieved. SAW based droplet ejection and vaporization have also been realized. SAW devices and FBARs have been used to detect antibody/antigen and rabbit/goat immunoglobulin type G molecules, showing their high sensitivity. The results have demonstrated the feasibility of using a single actuation mechanism for the LOC.

Theoretical foundations and applications of cyber-physical systems: a literature review

2019 ◽  
Vol 38 (1) ◽  
pp. 95-104 ◽  
Author(s):  
Caiming Zhang ◽  
Xiaojun Xu ◽  
Hong Chen
Keyword(s):  
Literature Review ◽  
Design Methodology ◽  
Review Paper ◽  
State Of The Art ◽  
Cyber Physical Systems ◽  
Comprehensive Overview ◽  
Content Type ◽  
Physical Systems ◽  
Current State ◽  
Theoretical Foundations

Purpose The purpose of this paper is to review the current research on theoretical foundations and applications for CPS from 2017 to 2019 including the applications in library. Design/methodology/approach This paper is designed in six parts as Introduction, Literature review, Theoretical foundations of CPS, Applications of CPS, CPS’s application in library and Conclusion. The authors review 70 papers and classify them as the above six parts. The authors collected 70 papers from 2017 to 2019 in the academic databases. Findings This paper reviews 70 papers regarding theoretical foundations and applications for CPS from 2017 to 2019 in the academic databases aiming to provide scholars and practitioners with a comprehensive overview. The contents of the papers in each research category are summarized from theoretical foundations and applications including the CPS applications in library. Originality/value A main contribution of this review paper is that it summarizes the current state-of-the-art theoretical foundations and applications for CPS and in libraries systematically.

WIRELESS SAW IDENTIFICATION AND SENSOR SYSTEMS

2000 ◽  
Vol 10 (04) ◽  
pp. 1143-1191 ◽  
Author(s):  
F. SCHMIDT ◽  
G. SCHOLL
Keyword(s):  
Acoustic Wave ◽  
Electromagnetic Interference ◽  
Acoustic Waves ◽  
Surface Acoustic Waves ◽  
Sensor Systems ◽  
Extreme Temperatures ◽  
Industrial Equipment ◽  
Design Rules ◽  
Saw Sensor ◽  
Saw Devices

Identification and sensor systems based on surface acoustic waves exhibit intriguing properties which have hitherto remained unexploited by semiconductor-based systems. They offer a long readout distance of up to more than 20 meters with purely passive surface acoustic wave (SAW) devices. SAW devices operate with no battery or wiring, withstand extreme temperatures and work reliably and maintenance-free over many decades even in harsh industrial environments. Because they operate at frequencies in the GHz range, SAW identification and sensor systems are well protected from the electromagnetic interference that often occurs in the vicinity of industrial equipment such as motors and high-voltage lines. The fundamentals and design rules of numerous passive wireless SAW sensor and identification systems for industrial and domestic applications as well as relevant practical work will be presented.

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