A new pressure sensor array for normal stress measurement in complex fluids

2021 ◽  
Vol 65 (4) ◽  
pp. 583-594
Author(s):  
Anaïs Gauthier ◽  
Mickaël Pruvost ◽  
Olivier Gamache ◽  
Annie Colin
Keyword(s):  
Normal Stress ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Stress Measurement ◽  
Complex Fluids

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Vehicle Pose Estimation System Base on Pressure Sensor Array for Clamping Parking Robot

2021 ◽  
Author(s):  
Juzhong Zhang ◽  
Yuyi Chu ◽  
Zhisen Wang ◽  
Tingfeng Ye ◽  
Liming Cai ◽  
...  
Keyword(s):  
Pose Estimation ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Estimation System

Machine learning post processing of underwater vehicle pressure sensor array for speed measurement

2020 ◽  
Vol 213 ◽  
pp. 107771
Author(s):  
Wilmer Ariza Ramirez ◽  
Zhi Quan Leong ◽  
Hung Duc Nguyen ◽  
Shantha Gamini Jayasinghe
Keyword(s):  
Machine Learning ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Underwater Vehicle ◽  
Post Processing ◽  
Speed Measurement

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer

2008 ◽  
Author(s):  
Joshua S. Krause ◽  
Robert D. White ◽  
Mark J. Moeller ◽  
Judith M. Gallman ◽  
Richard De Jong
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Single Element ◽  
Lumped Element ◽  
Depth Analysis ◽  
Fluid Damping ◽  
Sensitivity Studies ◽  
Gain Stage ◽  
Acoustic Sensitivity

The design, fabrication, and characterization of a surface micromachined, front-vented, 64 channel (8×8), capacitively sensed pressure sensor array is described. The array was fabricated using the MEMSCAP PolyMUMPs® process, a three layer polysilicon surface micromachining process. An acoustic lumped element circuit model was used to design the system. The results of our computations for the design, including mechanical components, environmental loading, fluid damping, and other acoustic elements are detailed. Theory predicts single element sensitivity of 1 mV/Pa at the gain stage output in the 400–40,000 Hz band. A laser Doppler velocimetry (LDV) system has been used to map the spatial motion of the elements in response to electrostatic excitation. A strong resonance appears at 480 kHz for electrostatic excitation, in good agreement with mathematical models. Static stiffness measured electrostatically using an interferometer is 0.1 nm/V2, similar to the expected stiffness. Preliminary acoustic sensitivity studies show single element acoustic sensitivity (as a function of frequency) increasing from 0.01 mV/Pa at 200 Hz to 0.16 mV/Pa at 2 kHz. A more in depth analysis of acoustic sensitivity is ongoing.

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