Analytical, computational, and experimental study of thermoviscous acoustic damping in perforated micro-electro-mechanical systems with flexible diaphragm
2021 ◽
Vol 150
(4)
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pp. 2749-2756
2007 ◽
Vol 38
(6)
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pp. 1223-1230
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2008 ◽
Vol 3
(1)
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pp. 37-43