Vertical cavity capacitive transducer

2021 ◽  
Vol 149 (4) ◽  
pp. 2137-2144
Author(s):  
Goksen G. Yaralioglu ◽  
A. Sanli Ergun ◽  
Ayhan Bozkurt
1998 ◽  
Vol 145 (5) ◽  
pp. 275-280 ◽  
Author(s):  
J.R. Meyer ◽  
D. Zhang ◽  
W.W. Bewley ◽  
C.L. Felix ◽  
L. Goldberg ◽  
...  

1999 ◽  
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pp. Pr2-3 ◽  
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A. Plais ◽  
F. Brillouet ◽  
E. Derouin ◽  
...  

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Viktor M. Ustinov ◽  
N.A. Maleev ◽  
Aleksei E. Zhukov ◽  
A.R. Kovsh ◽  
A.V. Sakharov ◽  
...  
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Author(s):  
F. Siegelin ◽  
C. Brillert

Abstract A failure analysis case study for oxide confined vertical cavity surface emitting laser (VCSEL) arrays will be presented. The focus of this work is on devices failing with a reduced optical output due to a rapid degradation of the laser diode. The complete analysis flow will be shown, including electrical and optical characterization as well as detailed investigations on a nanometer scale. It is known that these fails are caused by dislocations. An advanced FIB preparation method enabled cross-section and plan view TEM to successfully visualize the complete extent of a dislocation network.


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