Characterization of a microelectromechanical microphone using the finite element method
2013 ◽
Vol 134
(5)
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pp. 4122-4122
Keyword(s):
2019 ◽
Vol 1
(1)
◽
pp. e1014
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2012 ◽
Vol 131
(4)
◽
pp. 3153-3163
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Keyword(s):