Measuring elastic constants of novel materials and thin films using small sample resonant ultrasound spectroscopy

2006 ◽  
Vol 120 (5) ◽  
pp. 3033-3034
Author(s):  
J. D. Maynard
Keyword(s):  
Thin Films ◽  
Elastic Constants ◽  
Small Sample ◽  
Resonant Ultrasound Spectroscopy ◽  
Novel Materials ◽  
Resonant Ultrasound

Advanced Resonant-Ultrasound Spectroscopy for Studying Anisotropic Elastic Constants of Thin Films

2005 ◽  
Vol 875 ◽  
Author(s):  
Hirotsugu Ogi ◽  
Nobutomo Nakamura ◽  
Hiroshi Tanei ◽  
Masahiko Hirao
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Thickness ◽  
Elastic Constants ◽  
Elastic Anisotropy ◽  
Thickness Direction ◽  
Resonant Ultrasound Spectroscopy ◽  
Out Of Plane ◽  
Resonant Ultrasound ◽  
Anisotropic Elastic

AbstractThis paper presents two advanced acoustic methods for the determination of anisotropic elastic constants of deposited thin films. They are resonant-ultrasound spectroscopy with laser-Doppler interferometry (RUS/Laser method) and picosecond-laser ultrasound method. Deposited thin films usually exhibit elastic anisotropy between the film-growth direction and an in-plane direction, and they show five independent elastic constants denoted by C11,C33,C44,C66 and C13 when the x3 axis is set along the film-thickness direction. The former method determines four moduli except C44, the out-of-plane shear modulus, through free-vibration resonance frequencies of the film/substrate specimen. This method is applicable to thin films thicker than about 200 nm. The latter determines C33, the out-of-plane modulus, accurately bymeasuring the round-trip time of the longitudinal wave traveling along the film-thickness direction. This method is applicable to thin films thicker than about 20 nm. Thus, combination of these two methods allows us to discuss the elastic anisotropy of thin films. The results for Co/Pt superlattice thin film and copper thin film are presented.

Elastic Constants and Graphitic Grain Boundaries of Nanocrystalline CVD-Diamond Thin Films: Resonant Ultrasound Spectroscopy and Micromechanics Calculation

2005 ◽  
Vol 875 ◽  
Author(s):  
Hirotsugu Ogi ◽  
Nobutomo Nakamura ◽  
Hiroshi Tanei ◽  
Ryuji Ikeda ◽  
Masahiko Hirao ◽  
...  
Keyword(s):  
Thin Films ◽  
Grain Boundaries ◽  
Elastic Constants ◽  
Cvd Diamond ◽  
Silicon Substrates ◽  
Resonant Ultrasound Spectroscopy ◽  
Diamond Thin Films ◽  
Resonant Ultrasound ◽  
Bulk Diamond ◽  
Hot Filament

AbstractUsing resonant-ultrasound spectroscopy coupled with laser-Doppler interferometry, we determine the independent elastic constants of nanocrystalline CVD-diamond thin films with thickness between 2-12 μm. They are deposited on oriented monocrystal silicon substrates by the hot-filament methane/nitrogen CVD method. The diagonal components of the elastic constants are smaller than those of microcrystalline CVD diamond films and bulk diamond. However, the off-diagonal component is larger. We attribute these observations to the presence of sp2-bonded graphitic phase at grain boundaries. A micromechanics model assuming inclusions of thin graphitic plates consistently explains the observations.

Fast Recovery of Elasticity of Cu Thin Films at Room Temperature Studied by Resonant-Ultrasound Spectroscopy

2007 ◽  
Vol 46 (7B) ◽  
pp. 4450-4453 ◽  
Author(s):  
Nobutomo Nakamura ◽  
Hirotsugu Ogi ◽  
Takeo Nakashima ◽  
Masahiko Hirao ◽  
Masayoshi Nishiyama
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
Fast Recovery ◽  
Resonant Ultrasound Spectroscopy ◽  
Resonant Ultrasound
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