PARAMETRIC AMPLIFICATION OF A MEMS GYROSCOPE BY CAPACITANCE MODULATION

2012 ◽  
Vol 131 (4) ◽  
pp. 3190
Author(s):  
Burgess R. Johnson
Keyword(s):  
Parametric Amplification ◽  
Mems Gyroscope

A Parametrically Amplified MEMS Gyroscope

2010 ◽  
Vol 2010 (DPC) ◽  
pp. 001322-001334
Author(s):  
Barry J. Gallacher ◽  
Z. X. Hu ◽  
J. S. Burdess ◽  
K. M. Harish
Keyword(s):  
Open Loop ◽  
Parametric Amplification ◽  
Vibration Modes ◽  
Q Factor ◽  
Amplitude Control ◽  
Mems Gyroscope ◽  
Primary Mode ◽  
Harmonic Forcing ◽  
Control Schemes ◽  
Order Of Magnitude

The applicability of parametric amplification of either the primary and secondary vibration modes of a MEMS gyroscope, shown in Fig.1 is investigated experimentally in this paper. All control schemes have been implemented digitally onto a SHARC DSP development board. Parametric gains in excess of 80, which correspond to multiplication of the Q-factor by a factor of 80, are demonstrated experimentally for open-loop operation of the primary mode and are shown in Fig. 2. For open-loop operation it is shown that amplitude limiting nonlinearities become important as the vibration amplitude increases (see Figs.3) and that parametric amplification in excess of 80 can be only be achieved by further reducing the harmonic forcing amplitude. In many applications it is desirable to have as high a Q-factor as possible. The rate gyroscope is one application were active control of the Q-factor is extremely pertinent. If applied to the primary mode then it permits reduced forcing levels and hence contamination from “feedthrough”. If applied to the sense mode then the Coriolis force is effectively amplified. Parametric amplification of the secondary mode of the gyroscope is a challenging problem but it has the potential to improve the performance of MEMS rate gyroscope but an order of magnitude. In operation as a rate gyroscope it is important to maintain the amplitude of the primary mode of vibration at a constant level. For the case of a parametrically amplified primary mode the amplitude control circuit automatically adjusts the parametric excitation parameters to ensure the required parametric gain is achieved whilst at the same time reducing the amplitude of the harmonic forcing. In closed loop parametric amplification of the primary mode by a factor 20 have been demonstrated. Experimental results obtained from the amplified primary mode are shown in Fig.4.

Observation of parametric amplification of propagating dipole-exchange spin waves in yttrium iron garnet films

JETP Letters ◽  
1996 ◽  
Vol 64 (3) ◽  
pp. 171-176 ◽  
Author(s):  
B. A. Kalinikos ◽  
N. G. Kovshikov ◽  
M. P. Kostylev ◽  
H. Benner
Keyword(s):  
Yttrium Iron Garnet ◽  
Spin Waves ◽  
Parametric Amplification ◽  
Yttrium Iron ◽  
Garnet Films ◽  
Iron Garnet ◽  
Dipole Exchange

Yaw/Heading Optimization by Drift Elimination on MEMS Gyroscope

2021 ◽  
pp. 112691
Author(s):  
Minh Long Hoang ◽  
Antonio Pietrosanto
Keyword(s):  
Mems Gyroscope

scholarly journals A Combined Method for MEMS Gyroscope Error Compensation Using a Long Short-Term Memory Network and Kalman Filter in Random Vibration Environments

Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1181
Author(s):  
Chenhao Zhu ◽  
Sheng Cai ◽  
Yifan Yang ◽  
Wei Xu ◽  
Honghai Shen ◽  
...  
Keyword(s):  
Kalman Filter ◽  
Standard Deviation ◽  
Error Compensation ◽  
Random Vibration ◽  
Short Term Memory ◽  
Combined Method ◽  
Short Term ◽  
Mems Gyroscope ◽  
Long Short Term Memory ◽  
Lstm Network

In applications such as carrier attitude control and mobile device navigation, a micro-electro-mechanical-system (MEMS) gyroscope will inevitably be affected by random vibration, which significantly affects the performance of the MEMS gyroscope. In order to solve the degradation of MEMS gyroscope performance in random vibration environments, in this paper, a combined method of a long short-term memory (LSTM) network and Kalman filter (KF) is proposed for error compensation, where Kalman filter parameters are iteratively optimized using the Kalman smoother and expectation-maximization (EM) algorithm. In order to verify the effectiveness of the proposed method, we performed a linear random vibration test to acquire MEMS gyroscope data. Subsequently, an analysis of the effects of input data step size and network topology on gyroscope error compensation performance is presented. Furthermore, the autoregressive moving average-Kalman filter (ARMA-KF) model, which is commonly used in gyroscope error compensation, was also combined with the LSTM network as a comparison method. The results show that, for the x-axis data, the proposed combined method reduces the standard deviation (STD) by 51.58% and 31.92% compared to the bidirectional LSTM (BiLSTM) network, and EM-KF method, respectively. For the z-axis data, the proposed combined method reduces the standard deviation by 29.19% and 12.75% compared to the BiLSTM network and EM-KF method, respectively. Furthermore, for x-axis data and z-axis data, the proposed combined method reduces the standard deviation by 46.54% and 22.30% compared to the BiLSTM-ARMA-KF method, respectively, and the output is smoother, proving the effectiveness of the proposed method.

scholarly journals Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 902
Author(s):  
Hussamud Din ◽  
Faisal Iqbal ◽  
Byeungleul Lee
Keyword(s):  
Microelectromechanical Systems ◽  
Reduction Rate ◽  
Design Technique ◽  
Matching Method ◽  
Mems Gyroscope ◽  
Mode Split ◽  
The Cross ◽  
The Individual ◽  
Cross Axis ◽  
Ratio Matching

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

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