Method of making a semiconductor transducer having multiple level diaphragm structure
1990 ◽
Vol 87
(4)
◽
pp. 1834-1834
1989 ◽
Vol 44
(6)
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pp. 959-960
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Keyword(s):
Keyword(s):
2012 ◽
Vol 512-515
◽
pp. 679-685
2006 ◽
Vol 169
(2)
◽
pp. 413-425
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2008 ◽
Vol 159
(12)
◽
pp. 1535-1553
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2008 ◽
Vol 29
(7)
◽
pp. 918-924
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Keyword(s):
2004 ◽
Vol 11
(1)
◽
pp. 78-92
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