Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same

Yongli Huang

doi:10.1121/1.3262532

Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same

The Journal of the Acoustical Society of America ◽

10.1121/1.3262532 ◽

2009 ◽

Vol 126 (5) ◽

pp. 2829

Author(s):

Yongli Huang

Keyword(s):

Ultrasonic Transducer ◽

Transducer Array ◽

Electrical Connection ◽

Capacitive Micromachined Ultrasonic Transducer

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Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells

IEEE Transactions on Electron Devices ◽

10.1109/ted.2017.2746006 ◽

2017 ◽

Vol 64 (11) ◽

pp. 4636-4643 ◽

Cited By ~ 5

Author(s):

Shuai Na ◽

Zhou Zheng ◽

Albert I-Hsiang Chen ◽

Lawrence L. P. Wong ◽

Zhenhao Li ◽

...

Keyword(s):

High Power ◽

Ultrasonic Transducer ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer

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Fabrication of a Curved Row–Column Addressed Capacitive Micromachined Ultrasonic Transducer Array

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2016.2580152 ◽

2016 ◽

Vol 25 (4) ◽

pp. 675-682 ◽

Cited By ~ 11

Author(s):

Albert I-Hsiang Chen ◽

Lawrence L. P. Wong ◽

Shuai Na ◽

Zhenhao Li ◽

Mirek Macecek ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer

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Second Harmonic and Subharmonic for Non-Linear Wideband Contrast Imaging Using a Capacitive Micromachined Ultrasonic Transducer Array

Ultrasound in Medicine & Biology ◽

10.1016/j.ultrasmedbio.2013.03.002 ◽

2013 ◽

Vol 39 (8) ◽

pp. 1500-1512 ◽

Cited By ~ 16

Author(s):

Anthony Novell ◽

Jean-Michel Escoffre ◽

Ayache Bouakaz

Keyword(s):

Second Harmonic ◽

Ultrasonic Transducer ◽

Contrast Imaging ◽

Transducer Array ◽

Non Linear ◽

Capacitive Micromachined Ultrasonic Transducer

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Analytical Characterization and Simulation of a 2-D Capacitive Micromachined Ultrasonic Transducer Array Element

Journal of Computational and Theoretical Nanoscience ◽

10.1166/jctn.2015.4261 ◽

2015 ◽

Vol 12 (10) ◽

pp. 3692-3696

Author(s):

R. Maity ◽

N. P. Maity ◽

R. K. Thapa ◽

S. Baishya

Keyword(s):

Ultrasonic Transducer ◽

Array Element ◽

Transducer Array ◽

Analytical Characterization ◽

Capacitive Micromachined Ultrasonic Transducer

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Research on the Measuring System of Polymer-based Capacitive Micromachined Ultrasonic Transducer Array for Circular Planar Target

Proceedings of the Second International Conference on Mechanics, Materials and Structural Engineering (ICMMSE 2017) ◽

10.2991/icmmse-17.2017.22 ◽

2017 ◽

Author(s):

Gia Thinh Bui ◽

Yu-Hsuan Chiang ◽

Da-Chen Pang

Keyword(s):

Ultrasonic Transducer ◽

Measuring System ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Planar Target

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Development of a 6×6 Element Air-Coupled Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer Array, M3-CMUT, for High Resolution Detection Applications

Procedia Engineering ◽

10.1016/j.proeng.2014.11.263 ◽

2014 ◽

Vol 87 ◽

pp. 50-53

Author(s):

T.A. Emadi ◽

D.A. Buchanan

Keyword(s):

High Resolution ◽

Ultrasonic Transducer ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer

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Three-Side Buttable Integrated Ultrasound Chip With a 16$\,\times\,$16 Reconfigurable Transceiver and Capacitive Micromachined Ultrasonic Transducer Array for 3-D Ultrasound Imaging Systems

IEEE Transactions on Electron Devices ◽

10.1109/ted.2013.2278441 ◽

2013 ◽

Vol 60 (10) ◽

pp. 3562-3569 ◽

Cited By ~ 10

Author(s):

Sung-Jin Jung ◽

Jong-Keun Song ◽

Oh-Kyong Kwon

Keyword(s):

Ultrasound Imaging ◽

Ultrasonic Transducer ◽

Imaging Systems ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer

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Modeling of MEMS based capacitive micromachined ultrasonic transducer array element at static voltage

Computational Science and Engineering ◽

10.1201/9781315375021-3 ◽

2016 ◽

pp. 7-10

Author(s):

Reshmi Maity ◽

N.P. Maity ◽

Swapnil Vaish

Keyword(s):

Ultrasonic Transducer ◽

Array Element ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer

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Ultrasound Transmission through a Flexible Printed Circuit Board Bonded to the Front Side of a Capacitive Micromachined Ultrasonic Transducer Array: Feasibility Study

2019 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2019.8925606 ◽

2019 ◽

Author(s):

Chunkyun Seok ◽

Ziad Ali ◽

F. Yalcin Yamaner ◽

Omer Oralkan

Keyword(s):

Feasibility Study ◽

Printed Circuit Board ◽

Ultrasonic Transducer ◽

Circuit Board ◽

Front Side ◽

Transducer Array ◽

Printed Circuit ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Flexible Printed Circuit

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Quantitative imaging performance of frequency-tunable capacitive micromachined ultrasonic transducer array designed for intracardiac application: Phantom study

Ultrasonics ◽

10.1016/j.ultras.2017.11.021 ◽

2018 ◽

Vol 84 ◽

pp. 421-429 ◽

Cited By ~ 2

Author(s):

Martin Pekař ◽

Nenad Mihajlović ◽

Harm Belt ◽

Alexander F. Kolen ◽

Jeannet van Rens ◽

...

Keyword(s):

Ultrasonic Transducer ◽

Quantitative Imaging ◽

Phantom Study ◽

Transducer Array ◽

Capacitive Micromachined Ultrasonic Transducer ◽

Frequency Tunable ◽

Imaging Performance

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