Modelling of radiofrequency MEMS bulk acoustic wave resonators with Legendre polynomial method

2008 ◽  
Vol 123 (5) ◽  
pp. 3649-3649 ◽  
Author(s):  
Antoine A. Raherison ◽  
Faniry Emilson F. Ratolojanahary ◽  
Jean‐Etienne J. Lefebvre ◽  
Lahoucine L. Elmaimouni ◽  
Tadeusz T. Gryba
Keyword(s):  
Acoustic Wave ◽  
Legendre Polynomial ◽  
Bulk Acoustic Wave ◽  
Polynomial Method ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Legendre polynomial modeling of composite bulk acoustic wave resonators

2008 ◽  
Vol 104 (1) ◽  
pp. 014508 ◽  
Author(s):  
A. Raherison ◽  
F. E. Ratolojanahary ◽  
J. E. Lefebvre ◽  
L. Elmaimouni
Keyword(s):  
Acoustic Wave ◽  
Legendre Polynomial ◽  
Bulk Acoustic Wave ◽  
Polynomial Modeling ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Two-dimensional Legendre polynomial modeling of composite bulk acoustic wave resonators

2010 ◽  
Vol 108 (10) ◽  
pp. 104904 ◽  
Author(s):  
A. Raherison ◽  
J. E. Lefebvre ◽  
F. E. Ratolojanahary ◽  
L. Elmaimouni ◽  
T. Gryba
Keyword(s):  
Acoustic Wave ◽  
Legendre Polynomial ◽  
Bulk Acoustic Wave ◽  
Two Dimensional ◽  
Polynomial Modeling ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals All‐Epitaxial Bulk Acoustic Wave Resonators

2020 ◽  
Vol 217 (7) ◽  
pp. 1900786
Author(s):  
Jeffrey Miller ◽  
John Wright ◽  
Huili Grace Xing ◽  
Debdeep Jena
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Semi-insulating 4H-SiC lateral bulk acoustic wave resonators

2021 ◽  
Vol 118 (11) ◽  
pp. 114002
Author(s):  
B. Jiang ◽  
N. P. Opondo ◽  
S. A. Bhave
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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