Applications of Dry Etching to Microsensors, Field Emitters, and Optical Devices

The present paper describes research on the mechanical properties and related dislocation structure of CdTe, a II-VI semiconductor compound with a wide range of uses in electrical and optical devices. At room temperature CdTe exhibits little plasticity and at the same time relatively low strength and hardness. The mechanical behavior of CdTe was examined at elevated temperatures with the goal of understanding plastic flow in this material and eventually improving the room temperature properties. Several samples of single crystal CdTe of identical size and crystallographic orientation were deformed in compression at 300°C to various levels of total strain. A resolved shear stress vs. compressive glide strain curve (Figure la) was derived from the results of the tests and the knowledge of the sample orientation.

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Characteristics and Application of Temperature-Field Emitters

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100114347 ◽

1975 ◽

Vol 33 ◽

pp. 144-145

Author(s):

N. Tamura ◽

T. Goto ◽

Y. Harada

Keyword(s):

Temperature Field ◽

Electron Microscope ◽

Field Emission ◽

Resolving Power ◽

High Brightness ◽

Field Emitters ◽

Emission Electron ◽

Sufficient Stability ◽

Scanning Electron ◽

Illuminating System

On account of its high brightness, the field emission electron source has the advantage that it provides the conventional electron microscope with highly coherent illuminating system and that it directly improves the, resolving power of the scanning electron microscope. The present authors have reported some results obtained with a 100 kV field emission electron microscope.It has been proven, furthermore, that the tungsten emitter as a temperature field emission source can be utilized with a sufficient stability under a modest vacuum of 10-8 ~ 10-9 Torr. The present paper is concerned with an extension of our study on the characteristics of the temperature field emitters.

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Design of a Field-Emission Gun for the Phillips CM20/STEM microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100134090 ◽

1990 ◽

Vol 48 (2) ◽

pp. 100-101

Author(s):

P.M. Mul ◽

B.J.M. Bormans ◽

L. Schaap

Keyword(s):

High Resolution ◽

Field Emission ◽

Analytical Electron Microscopy ◽

Emission Region ◽

Attractive Alternative ◽

Electron Holography ◽

Field Emitter ◽

Field Emitters ◽

Resolution Electron ◽

High Resolution Tem

The first Field Emission Guns (FEG) on TEM/STEM instruments were introduced by Philips in 1977. In the past decade these EM400-series microscopes have been very successful, especially in analytical electron microscopy, where the high currents in small probes are particularly suitable. In High Resolution Electron Holography, the high coherence of the FEG has made it possible to approach atomic resolution.Most of these TEM/STEM systems are based on a cold field emitter (CFE). There are, however, a number of disadvantages to CFE’s, because of their very small emission region: the maximum current is limited (a strong disadvantage for high-resolution TEM imaging) and the emission is unstable, requiring special measures to reduce the strong FEG-induced noise. Thermal field emitters (TFE), i.e. a zirconiated field emitter source operating in the thermal or Schottky mode, have been shown to be a viable and attractive alternative to CFE’s. TFE’s have larger emission regions, providing much higher maximum currents, better stability, and reduced sensitivity to vacuum conditions as well as mechanical and electrical interferences.

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MICROPROCESSOR CONTROLLED REMOLDING OF FIELD EMITTERS

Le Journal de Physique Colloques ◽

10.1051/jphyscol:1986776 ◽

1986 ◽

Vol 47 (C7) ◽

pp. C7-453-C7-458

Author(s):

F. HASSELBACH ◽

M. NICKLAUS ◽

K. ZEUNER

Keyword(s):

Field Emitters

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