<title>An Improved Zoom Lens With External Entrance Pupil</title>

Wide-angle zoom lens with removed forward entrance pupil

10.1117/12.322008 ◽

1998 ◽

Author(s):

Irina L. Livshits-Anitropova ◽

Michael M. Russinov ◽

Igor G. Bronchtein

Keyword(s):

Zoom Lens ◽

Wide Angle ◽

Entrance Pupil

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Zoom lens for a beam with finite emittance

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/0168-9002(95)00423-8 ◽

1995 ◽

Vol 363 (1-2) ◽

pp. 64-66 ◽

Cited By ~ 1

Author(s):

E.V. Shpak

Keyword(s):

Zoom Lens

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ON OPTIMUM PUPIL FIELDS WITH MAXIMUM ELECTRIC FIELD COMPONENT IN FOCUS

Journal of Nonlinear Optical Physics & Materials ◽

10.1142/s0218863510005017 ◽

2010 ◽

Vol 19 (01) ◽

pp. 189-201

Author(s):

H. P. URBACH ◽

S. F. PEREIRA ◽

D. J. BROER

Keyword(s):

Electric Field ◽

Field Component ◽

Optical Axis ◽

Focal Point ◽

Longitudinal Component ◽

Electric Field Component ◽

Incident Power ◽

Entrance Pupil ◽

Maximum Electric Field ◽

High Na Lens

The field in the entrance pupil of a high NA lens can be optimized such that, for given incident power, the electric field component in a given direction in the focal point is maximum. If the field component is chosen parallel to the optical axis, the longitudinal component is maximized and it is found that the optimum longitudinal component is narrower than the Airy spot. We discuss how this can be used to obtain higher resolution in photolithography when a resist is used that is sensitive to only the longitudinal component. We describe a proposition for realizing such resist.

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