In-Situ Diagnostics For Plasma Processing

1989 ◽  
Author(s):  
P. Banks ◽  
W. Pilz ◽  
I. Hussla ◽  
G. Lorenz ◽  
G. Castrischer
Keyword(s):  
Plasma Processing ◽  
In Situ Diagnostics

Concepts for In Situ Diagnostics in Analog Microelectronic Circuits

2007 ◽  
Author(s):  
Ted Kolasa ◽  
Alfredo Mendoza
Keyword(s):  
Analog Circuits ◽  
System Architecture ◽  
Analog Circuit ◽  
Fault Localization ◽  
Diagnostic System ◽  
Diagnostic Capability ◽  
Common Signal ◽  
Diagnostic Capabilities ◽  
In Situ Diagnostics

Abstract Comprehensive in situ (designed-in) diagnostic capabilities have been incorporated into digital microelectronic systems for years, yet similar capabilities are not commonly incorporated into the design of analog microelectronics. And as feature sizes shrink and back end interconnect metallization becomes more complex, the need for effective diagnostics for analog circuits becomes ever more critical. This paper presents concepts for incorporating in situ diagnostic capability into analog circuit designs. Aspects of analog diagnostic system architecture are discussed as well as nodal measurement scenarios for common signal types. As microelectronic feature sizes continue to shrink, diagnostic capabilities such as those presented here will become essential to the process of fault localization in analog circuits.

Systems of In Situ Diagnostics of Plasma-Surface Interaction in a Mephist-1 Tokamak

2021 ◽  
Author(s):  
V. A. Kurnaev ◽  
V. E. Nikolaeva ◽  
S. A. Krat ◽  
E. D. Vovchenko ◽  
A. V. Kaziev ◽  
...  
Keyword(s):  
Surface Interaction ◽  
Plasma Surface ◽  
In Situ Diagnostics

In situ growth rate measurements for plasma processing of opaque materials

2002 ◽  
Vol 418 (2) ◽  
pp. 151-155
Author(s):  
A Salifu ◽  
G Zhang ◽  
Edward A Evans
Keyword(s):  
Growth Rate ◽  
Plasma Processing ◽  
In Situ Growth

In-situ Diagnostics of Composite Filament Material Suitable for Bi-Polar Plate Using Additive Manufacturing

2021 ◽  
Vol 104 (8) ◽  
pp. 283-292
Author(s):  
David Alexander ◽  
Jake Pellicotte ◽  
Alejandro Mejia ◽  
Caitlin Benway ◽  
Calvin Maurice Stewart ◽  
...  
Keyword(s):  
Additive Manufacturing ◽  
Composite Filament ◽  
In Situ Diagnostics

An upgraded LIBS system on linear plasma device PSI-2 for in situ diagnostics of plasma-facing materials

2019 ◽  
Vol 146 ◽  
pp. 96-99 ◽  
Author(s):  
X. Jiang ◽  
G. Sergienko ◽  
B. Schweer ◽  
S. Möller ◽  
M. Freisinger ◽  
...  
Keyword(s):  
Plasma Device ◽  
Plasma Facing Materials ◽  
Linear Plasma ◽  
In Situ Diagnostics

scholarly journals In Situ Diagnostics of Damage Accumulation in Ni-Based Superalloys Using High-Temperature Computed Tomography

2018 ◽  
Vol 49 (9) ◽  
pp. 4274-4289 ◽  
Author(s):  
K. Kageyama ◽  
F. Adziman ◽  
E. Alabort ◽  
T. Sui ◽  
A. M. Korsunsky ◽  
...  
Keyword(s):  
Computed Tomography ◽  
High Temperature ◽  
Damage Accumulation ◽  
In Situ Diagnostics

In situ diagnostics and control of laser-induced removal of iron oxide layers

2002 ◽  
Vol 150 (1) ◽  
pp. 57-63 ◽  
Author(s):  
N Chaoui ◽  
P Pasquet ◽  
J Solis ◽  
C.N Afonso ◽  
R Oltra
Keyword(s):  
Iron Oxide ◽  
Diagnostics And Control ◽  
Oxide Layers ◽  
And Control ◽  
In Situ Diagnostics
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