Diamond-Like Carbon Films By RF Plasma - Enhanced Chemical Vapour Deposition

Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

Thin Solid Films ◽

10.1016/s0040-6090(97)00411-2 ◽

1997 ◽

Vol 308-309 ◽

pp. 263-267 ◽

Cited By ~ 79

Author(s):

Kwang-Ryeol Lee ◽

Myoung-Geun Kim ◽

Sung-Jin Cho ◽

Kwang Yong Eun ◽

Tae-Yeon Seong

Keyword(s):

Mechanical Properties ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Rf Plasma ◽

Diamond Like Carbon ◽

Structural Dependence

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The properties of fluorine containing diamond-like carbon films prepared by plasma-enhanced chemical vapour deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2008.09.021 ◽

2009 ◽

Vol 18 (1) ◽

pp. 66-71 ◽

Cited By ~ 61

Author(s):

A. Bendavid ◽

P.J. Martin ◽

L. Randeniya ◽

M.S. Amin

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon

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R.f. plasma-assisted chemical vapour deposition of diamond-like carbon films on complex geometries

Diamond and Related Materials ◽

10.1016/0925-9635(93)90067-c ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 272-277 ◽

Cited By ~ 11

Author(s):

E.H.A. Dekempeneer ◽

L. Eersels ◽

J. Smeets ◽

J. Meneve ◽

R. Jacobs ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Complex Geometries ◽

Diamond Like Carbon

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Correlation of Mechanical Properties with Surface Morphology of Diamond-Like Carbon Films Deposited By Plasma Enhanced Chemical Vapour Deposition Technique

International Journal of Innovative Research in Science Engineering and Technology ◽

10.15680/ijirset.2014.0308060 ◽

2014 ◽

Vol 3 (8) ◽

pp. 15510-15517

Author(s):

S. Mahant ◽

Rishi Sharma, ◽

Neelima Sharma ◽

S. K. Pradhan ◽

P. K. Barhai

Keyword(s):

Mechanical Properties ◽

Surface Morphology ◽

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon ◽

Deposition Technique ◽

Chemical Vapour Deposition Technique

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Time-dependent evolution of the structure and chemical bonds in diamond-like carbon films generated by the hot filament chemical vapour deposition method

Thin Solid Films ◽

10.1016/0040-6090(93)90756-f ◽

1993 ◽

Vol 232 (1) ◽

pp. 21-27 ◽

Cited By ~ 5

Author(s):

M.L. Terranova ◽

V. Sessa ◽

V. Rigato ◽

F. Caccavale ◽

M. Braglia ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Time Dependent ◽

Diamond Like Carbon ◽

Chemical Bonds ◽

Deposition Method ◽

Hot Filament ◽

Chemical Vapour Deposition Method

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Deposition of silicon-containing diamond-like carbon films by plasma-enhanced chemical vapour deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2009.02.117 ◽

2009 ◽

Vol 203 (17-18) ◽

pp. 2747-2750 ◽

Cited By ~ 26

Author(s):

K. Baba ◽

R. Hatada ◽

S. Flege ◽

W. Ensinger

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon

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Diamond-like carbon films with End-Hall ion source enhanced chemical vapour deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2006.05.003 ◽

2007 ◽

Vol 16 (2) ◽

pp. 220-224 ◽

Cited By ~ 7

Author(s):

Y.Q. Pan ◽

Y. Yin

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Ion Source ◽

Diamond Like Carbon

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Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

Chinese Physics ◽

10.1088/1009-1963/12/11/313 ◽

2003 ◽

Vol 12 (11) ◽

pp. 1257-1260 ◽

Cited By ~ 3

Author(s):

Yang Wu-Bao ◽

Wang Jiu-Li ◽

Zhang Gu-Ling ◽

Fan Song-Hua ◽

Liu Chi-Zi ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Chemical Vapour ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Resonance Microwave

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The properties of fluorine-containing diamond-like carbon films prepared by pulsed DC plasma-activated chemical vapour deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2010.10.001 ◽

2010 ◽

Vol 19 (12) ◽

pp. 1466-1471 ◽

Cited By ~ 45

Author(s):

A. Bendavid ◽

P.J. Martin ◽

L. Randeniya ◽

M.S. Amin ◽

R. Rohanizadeh

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon ◽

Dc Plasma ◽

Pulsed Dc

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Deposition of diamond-like carbon films by photon-enhanced chemical vapour deposition of methane using a windowless hydrogen lamp

Diamond and Related Materials ◽

10.1016/0925-9635(93)90064-9 ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 255-258 ◽

Cited By ~ 4

Author(s):

A.J. White ◽

W.I. Milne

Keyword(s):

Chemical Vapour Deposition ◽

Vapour Deposition ◽

Chemical Vapour ◽

Carbon Films ◽

Diamond Like Carbon

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