Characteristics Of A Pulsed, Liquid-Metal Field Emission Source For Use In Fast High-Current Switches

Application of a thermal field emission source for high resolution, high current e‐beam microprobes

Journal of Vacuum Science and Technology ◽

10.1116/1.570275 ◽

1979 ◽

Vol 16 (6) ◽

pp. 1699-1703 ◽

Cited By ~ 24

Author(s):

D. Tuggle ◽

L. W. Swanson ◽

J. Orloff

Keyword(s):

High Resolution ◽

Field Emission ◽

Thermal Field ◽

Emission Source ◽

High Current

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The development of a new field emission source applying electrohydrodynamics of liquid metal

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/0168-9002(95)00053-4 ◽

1995 ◽

Vol 363 (1-2) ◽

pp. 239-242 ◽

Cited By ~ 1

Author(s):

K. Hata ◽

T. Yasuda ◽

Y. Saito ◽

A. Ohshita

Keyword(s):

Liquid Metal ◽

Field Emission ◽

Emission Source

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A High Resolution Scanning Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100101529 ◽

1968 ◽

Vol 26 ◽

pp. 356-357

Author(s):

A. V. Crewe ◽

J. Wall ◽

L. M. Welter

Keyword(s):

High Resolution ◽

Field Emission ◽

Spherical Aberration ◽

Focal Length ◽

Spot Size ◽

Emission Source ◽

Field Of View ◽

Scanning Microscope ◽

Magnetic Lens ◽

High Quality

A scanning microscope using a field emission source has been described elsewhere. This microscope has now been improved by replacing the single magnetic lens with a high quality lens of the type described by Ruska. This lens has a focal length of 1 mm and a spherical aberration coefficient of 0.5 mm. The final spot size, and therefore the microscope resolution, is limited by the aberration of this lens to about 6 Å.The lens has been constructed very carefully, maintaining a tolerance of + 1 μ on all critical surfaces. The gun is prealigned on the lens to form a compact unit. The only mechanical adjustments are those which control the specimen and the tip positions. The microscope can be used in two modes. With the lens off and the gun focused on the specimen, the resolution is 250 Å over an undistorted field of view of 2 mm. With the lens on,the resolution is 20 Å or better over a field of view of 40 microns. The magnification can be accurately varied by attenuating the raster current.

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