Non-Destructive Characterization Of Carrier Concentration And Thickness Uniformity For Semiconductors Using Infrared Reflectance Spectroscopy
2004 ◽
Vol 43
(8A)
◽
pp. 5151-5156
◽
2005 ◽
Vol 215
(1-4)
◽
pp. 453-472
◽
2011 ◽
Vol 25
(1)
◽
pp. 19-37
◽
2006 ◽
Vol 45
(No. 46)
◽
pp. L1226-L1229
◽
2006 ◽
Vol 386
(6)
◽
pp. 1823-1833
◽