An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology

Mapping Intimacies ◽

10.1117/12.940433 ◽

1987 ◽

Cited By ~ 58

Author(s):

Mark Davidson ◽

Kalman Kaufman ◽

Isaac Mazor ◽

Felix Cohen

Keyword(s):

Integrated Circuit ◽

Interference Microscopy ◽

Integrated Circuit Inspection

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Fast 3D Integrated Circuit Inspection

Machine Vision for Three-Dimensional Scenes ◽

10.1016/b978-0-12-266722-0.50012-9 ◽

1990 ◽

pp. 243-266 ◽

Cited By ~ 2

Author(s):

Arend van de Stadt ◽

Albert Sicignano

Keyword(s):

Integrated Circuit ◽

Integrated Circuit Inspection

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A Machine Vision Architecture For Integrated Circuit Inspection

10.1117/12.953126 ◽

1989 ◽

Author(s):

Sal D' Agostino

Keyword(s):

Machine Vision ◽

Integrated Circuit ◽

Integrated Circuit Inspection

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Low voltage backscattered electron collection for package substrates and integrated circuit inspection

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585851 ◽

1991 ◽

Vol 9 (6) ◽

pp. 3590 ◽

Cited By ~ 4

Author(s):

K. L. Lee

Keyword(s):

Integrated Circuit ◽

Low Voltage ◽

Electron Collection ◽

Backscattered Electron ◽

Integrated Circuit Inspection

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HOLOGRAPHIC MICROSCOPY AND INTEGRATED CIRCUIT INSPECTION

Annals of the New York Academy of Sciences ◽

10.1111/j.1749-6632.1969.tb43138.x ◽

1969 ◽

Vol 168 (3 Second Confer) ◽

pp. 510-535 ◽

Cited By ~ 1

Author(s):

Raoul F. Ligten ◽

Kenneth C. Lawton

Keyword(s):

Integrated Circuit ◽

Holographic Microscopy ◽

Integrated Circuit Inspection

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Use of color in integrated-circuit inspection

10.1117/12.19708 ◽

1990 ◽

Author(s):

Matthew J. Barth ◽

Gerardo Beni ◽

Susan Hackwood

Keyword(s):

Integrated Circuit ◽

Integrated Circuit Inspection

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Integrated Circuit Inspection Via Acoustic Microscopy

IEEE Transactions on Sonics and Ultrasonics ◽

10.1109/t-su.1983.31381 ◽

1983 ◽

Vol 30 (1) ◽

pp. 40-42 ◽

Cited By ~ 24

Author(s):

R.D. Weglein

Keyword(s):

Integrated Circuit ◽

Acoustic Microscopy ◽

Integrated Circuit Inspection

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Machine Vision Techniques for Integrated Circuit Inspection

Machine Vision for Inspection and Measurement ◽

10.1016/b978-0-12-266719-0.50015-4 ◽

1989 ◽

pp. 257-282 ◽

Cited By ~ 2

Author(s):

Byron Dom

Keyword(s):

Machine Vision ◽

Integrated Circuit ◽

Integrated Circuit Inspection

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Analytic design of monitoring facilities for integrated circuit inspection

Measurement Techniques ◽

10.1007/s11018-009-9220-8 ◽

2009 ◽

Vol 52 (1) ◽

pp. 16-19

Author(s):

A. S. Bondarevskii ◽

F. V. Krekoten

Keyword(s):

Integrated Circuit ◽

Analytic Design ◽

Integrated Circuit Inspection

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Software Automation and Optimization of an X-ray Microscope Custom Designed for Integrated Circuit Inspection

Microscopy and Microanalysis ◽

10.1017/s1431927618012953 ◽

2018 ◽

Vol 24 (S2) ◽

pp. 114-115

Author(s):

Michael Sutherland ◽

Christopher Powell ◽

Skylar Downes

Keyword(s):

Integrated Circuit ◽

X Ray ◽

Integrated Circuit Inspection ◽

Software Automation

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Mathematical morphology applied to integrated circuit inspection

Journal of Crystal Growth ◽

10.1016/0022-0248(90)90218-a ◽

1990 ◽

Vol 103 (1-4) ◽

pp. 407-412

Author(s):

Jordi Vitrià ◽

Juan Jose Villanueva

Keyword(s):

Mathematical Morphology ◽

Integrated Circuit ◽

Integrated Circuit Inspection

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