X-Ray Lithography Using Wiggler And Undulator Synchrotron Radiation Sources
1981 ◽
Vol 52
(4)
◽
pp. 509-516
◽
1984 ◽
Vol 17
(4)
◽
pp. 231-237
◽
1995 ◽
Vol 75
◽
pp. 9-22
◽
1995 ◽
Vol 02
(04)
◽
pp. 501-512
◽