Characterization Of Ti In-Diffused Waveguides Using Secondary Ion Mass Spectrometry (SIMS) And Electron Microprobe Analysis (EMPA)

1987 ◽  
Author(s):  
E. A. Leone ◽  
A. J. Signorelli ◽  
S. Sriram ◽  
P. Vohralik
Keyword(s):  
Mass Spectrometry ◽  
Electron Microprobe ◽  
Microprobe Analysis ◽  
Electron Microprobe Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Characterization of the superlattice region of a quantum cascade laser by secondary ion mass spectrometry

Nanoscale ◽  
2017 ◽  
Vol 9 (44) ◽  
pp. 17571-17575 ◽  
Author(s):  
Paweł Piotr Michałowski ◽  
Piotr Gutowski ◽  
Dorota Pierścińska ◽  
Kamil Pierściński ◽  
Maciej Bugajski ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Quantum Cascade Laser ◽  
Secondary Ion Mass Spectrometry ◽  
Quantum Cascade ◽  
Oxygen Contamination ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Non-uniform oxygen contamination in the superlattice region of a quantum cascade laser measured by secondary ion mass spectrometry.

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