Growth And Characterization Of High Purity H2-In-HCl-PH3 Vapor Phase Epitaxy (VPE) InP

1982 ◽  
Author(s):  
T. J. Roth ◽  
B. J. Skromme ◽  
T. S. Low ◽  
G. E. Stillman ◽  
L. M. Zinkiewicz
Keyword(s):  
Vapor Phase ◽  
High Purity ◽  
Vapor Phase Epitaxy

Characterization of free-standing GaN substrate grown through hydride vapor phase epitaxy with a TiN interlayer

2007 ◽  
Vol 253 (18) ◽  
pp. 7423-7428 ◽  
Author(s):  
T.B. Wei ◽  
R.F. Duan ◽  
J.X. Wang ◽  
J.M. Li ◽  
Z.Q. Huo ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy ◽  
Free Standing

Photoreflectance characterization of vanadium-doped GaAs layers grown by metalorganic vapor phase epitaxy

2015 ◽  
Vol 31 ◽  
pp. 100-105 ◽  
Author(s):  
C. Bilel ◽  
H. Fitouri ◽  
I. Zaied ◽  
A. Bchetnia ◽  
A. Rebey ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

Growth and characterization of low defect GaN by hydride vapor phase epitaxy

2002 ◽  
Vol 246 (3-4) ◽  
pp. 223-229 ◽  
Author(s):  
Xueping Xu ◽  
R.P Vaudo ◽  
C Loria ◽  
A Salant ◽  
G.R Brandes ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Hydride Vapor Phase Epitaxy

Characterization of Hazy Morphology on AlInP/GaAs Epitaxial Wafers Grown by Organometallic Vapor Phase Epitaxy

2020 ◽  
Vol MA2020-02 (26) ◽  
pp. 1836-1836
Author(s):  
Hongyu Peng ◽  
Tuerxun Ailihumaer ◽  
Yafei Liu ◽  
Balaji Raghothamachar ◽  
Michael Dudley
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Organometallic Vapor Phase Epitaxy

Characterization of the Shallow and Deep Levels in Si Doped GaN Grown by Metal-Organic Vapor Phase Epitaxy

1994 ◽  
Vol 33 (Part 1, No. 12A) ◽  
pp. 6443-6447 ◽  
Author(s):  
Peter Hacke ◽  
Atsuyoshi Maekawa ◽  
Norikatsu Koide ◽  
Kazumasa Hiramatsu ◽  
Nobuhiko Sawaki
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Deep Levels ◽  
Organic Vapor ◽  
Metal Organic ◽  
Si Doped
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