Metal organic chemical vapor deposition and investigation of structural, optical and gas sensing characteristics of ZnO thin film grown on quartz

2012 ◽  
Author(s):  
S. Pati ◽  
P. Banerji ◽  
S. B. Majumder
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Gas Sensing ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Thin Film ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition ◽  
Sensing Characteristics

ZnO thin film grown on silicon by metal-organic chemical vapor deposition

2002 ◽  
Vol 243 (1) ◽  
pp. 13-18 ◽  
Author(s):  
Xinqiang Wang ◽  
Shuren Yang ◽  
Xiaotian Yang ◽  
Dan Liu ◽  
Yuantao Zhang ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Zno Thin Film ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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