Determination of the metrological characteristics of optical surface topography measuring instruments
Keyword(s):
Determination of the transfer function for optical surface topography measuring instruments—a review
2013 ◽
Vol 24
(5)
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pp. 052001
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Keyword(s):
2019 ◽
Vol 7
(1)
◽
pp. 015024
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2020 ◽
Vol 65
(7-8)
◽
pp. 37-41
2004 ◽
Vol 10
(4)
◽
pp. 207-214
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