This paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k2eff) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10-4µm2and 7.84x10-4µm2for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6%.
AlN has been widely used as the piezoelectric thin film layer in film bulk acoustic wave resonator (FBAR). The performance of FBAR is influenced by various geometrical parameters and losses from piezoelectric material such as thermoelastic damping and material damping. This research focuses on the estimation of material damping coefficients (α and β) of the AlN by using the Akhieser approximation to estimate more accurate values of the coefficients, thus a more realistic value of the quality (Q) factor is achieved for FBAR operating at Ku-band frequency ranges (12 GHz-18 GHz).
The design and analysis of Ku-band ladder-type filters based on film bulk acoustic wave resonator (FBAR) is presented. The proposed FBAR filter has an insertion loss of-3dB, out-of-band rejection of-12dB, centre frequency of 15.5GHz with 3dB bandwidth of 1.0GHz. Based on the characteristics of the FBAR filter, the expected characteristics of FBAR resonators are determined by using the Butterworth Van Dyke (BVD) equivalent circuit.
This paper presents the design of ladder-type filters based on film bulk acoustic wave resonator (FBAR) in Ku-band. The proposed FBAR filter has an insertion loss of −3 dB, out-of-band rejection of −12 dB and 3 dB bandwidth of 1.0 GHz from 15 GHz to 16 GHz. Based on the characteristics of the FBAR filter, the expected characteristics of FBAR resonators are determined by using the 1D numerical analysis. This design proves that it is possible to design a wide-bandwidth FBAR filter in Ku-band.
Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band