30nm full field quartz template replicated from Si master for FLASH active layer NIL
2006 ◽
Vol 54
(4)
◽
pp. 327
2014 ◽
Vol 52
(9)
◽
pp. 739-744
◽
2008 ◽
Vol 128
(5)
◽
pp. 732-737
2017 ◽
Vol E100.C
(2)
◽
pp. 196-203
◽
2018 ◽