30nm full field quartz template replicated from Si master for FLASH active layer NIL

2011 ◽  
Author(s):  
Duhyun Lee ◽  
Byung-Kyu Lee ◽  
Woong Ko ◽  
Jae-Kwan Kim ◽  
Kiyeon Yang ◽  
...  
Author(s):  
S. Andrietti ◽  
M. Bernacki ◽  
N. Bozzolo ◽  
L. Maire ◽  
P. De Micheli ◽  
...  
Keyword(s):  

2008 ◽  
Vol 128 (5) ◽  
pp. 732-737
Author(s):  
Hiroyuki Ichikawa ◽  
Masashi Ito ◽  
Chie Fukuda ◽  
Kotaro Hamada ◽  
Akira Yamaguchi ◽  
...  

2017 ◽  
Vol E100.C (2) ◽  
pp. 196-203 ◽  
Author(s):  
Takuro FUJII ◽  
Koji TAKEDA ◽  
Erina KANNO ◽  
Koichi HASEBE ◽  
Hidetaka NISHI ◽  
...  

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