Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine

2011 ◽  
Author(s):  
Ping Yang ◽  
Tomohiko Takamura ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu ◽  
Osamu Sato ◽  
...  
Keyword(s):  
High Precision ◽  
Coordinate Measuring Machine ◽  
Probe System ◽  
Measuring Machine ◽  
Laser Interferometers

A Multi-Probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM

2010 ◽  
Vol 447-448 ◽  
pp. 590-594 ◽  
Author(s):  
Ping Yang ◽  
Shusaku Shibata ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu ◽  
Osamu Sato ◽  
...  
Keyword(s):  
High Precision ◽  
Coordinate Measuring Machine ◽  
Simultaneous Equation ◽  
High Accuracy ◽  
Probe Measurement ◽  
Probe Method ◽  
Measuring Machine ◽  
Simulation Results ◽  
Straightness Error ◽  
Laser Interferometers

To develop a high precision Micro Coordinate Measuring Machine (Micro-CMM), it is important to evaluate an X-Y stage on the Micro-CMM. A precision multi-probe measurement system has been designed and developed for simultaneously measuring the yaw and straightness errors of the X-Y stage. In the system, an autocollimator measures the yaw error of the stage, and two laser interferometers measure the profile of a standard mirror which is fixed on the X-Y stage. The straightness error is reconstructed by the application of simultaneous equation and least-squares methods, and the uncertainty associated with the multi-probe method is simulated. When the interval of the laser interferometers equals 10 mm, the standard deviation of multi-probe method using the high accuracy autocollimator and the laser interferometers is about 10 nm. The simulation results satisfy our purpose for the uncertainty of 50 nm, and practical considerations are discussed.

Development of a Sensitive Probe for Coordinate Measuring Machines

2005 ◽  
Vol 295-296 ◽  
pp. 325-330 ◽  
Author(s):  
M. Watanabe ◽  
Ryoshu Furutani
Keyword(s):  
Laser Diode ◽  
Precision Measurement ◽  
Coordinate Measuring Machine ◽  
Coordinate Measuring Machines ◽  
Contact Type ◽  
Photo Diode ◽  
Probe System ◽  
Measuring Machine ◽  
Industrial Needs

Requirement for precision measurement becomes extremely advanced as industrial needs advances. CMM (Coordinate Measuring Machine) is one of the most adequate measuring machines to meet the requirement. As the precision of CMM becomes higher, it is important to improve the sensitivity of probe. We developed a contact type probe which consisted of a QPD (quadratic photo diode), a ball lens, and a laser diode to detect the displacement of stylus. The probe system has a resolution of 31nm.

Calibrator for 2D Grid Plate Using Imaging Coordinate Measuring Machine with Laser Interferometers

2015 ◽  
Vol 9 (5) ◽  
pp. 541-545 ◽  
Author(s):  
Mariko Kajima ◽  
◽  
Tsukasa Watanabe ◽  
Makoto Abe ◽  
Toshiyuki Takatsuji
Keyword(s):  
Measurement Method ◽  
Laser Interferometer ◽  
Coordinate Measuring Machine ◽  
Calibration Procedure ◽  
Expanded Uncertainty ◽  
Geometrical Error ◽  
Grid Plate ◽  
Measuring Machine ◽  
Laser Interferometers

A calibrator for 2D grid plates have been developed. The calibrator was based on a commercial imaging coordinate measuring machine (imaging CMM). A laser interferometer for the calibration of the x-coordinate and two laser interferometers for the calibration of the y-coordinate were attached to the imaging CMM. By applying multistep measurement method for the calibration procedure, the geometrical error in the calibrator was reduced. The calibration of a precision 2D grid plate was demonstrated, and the expanded uncertainty was estimated to be 0.2 μm (k =2).

Measurement System for Non-Cylinder Pin Hole of Piston

2011 ◽  
Vol 301-303 ◽  
pp. 617-622
Author(s):  
Z. Y. Yang ◽  
D. H. Liu ◽  
F. Yang ◽  
Z. G. Xie ◽  
Y. Huang
Keyword(s):  
High Precision ◽  
Measurement System ◽  
Coordinate Measuring Machine ◽  
Measuring Instrument ◽  
Movement Error ◽  
Pneumatic Measuring ◽  
Software Modules ◽  
Measuring Machine

Aim to the low measuring precision of non-cylinder pin hole using the coordinate measuring machine(CMM)and pneumatic measuring instrument, a new solution is proposed which use the high-precision digital lever probe to detect the contours of pin hole with a single clamping situation. The measuring principal of non-cylinder pin hole of piston is introduced and the functions and measuring processes of the measurement system are also presented. The software modules are given and the probe centering error and the parallelism movement error are discussed detailedly. A measuring example is given in the end. The measuring results show that the measurement system has the ability to detect the contours of pin hole with high-precision and efficiently.

scholarly journals Usage of I++ Simulator to Program Coordinate Measuring Machines when Common Programming Methods are difficult to apply

2014 ◽  
Vol 14 (1) ◽  
pp. 1-7 ◽  
Author(s):  
A. Gąska ◽  
D. Szewczyk ◽  
P. Gąska ◽  
M. Gruza ◽  
J. Sładek
Keyword(s):  
High Precision ◽  
Coordinate Measuring Machine ◽  
Coordinate Measuring Machines ◽  
General Process ◽  
Standard Methods ◽  
Machine Performance ◽  
Measuring Machine ◽  
Machine Programming ◽  
Real Machine

Abstract Nowadays, simulators facilitate tasks performed daily by the engineers of different branches, including coordinate metrologists. Sometimes it is difficult or almost impossible to program a Coordinate Measuring Machine (CMM) using standard methods. This happens, for example, during measurements of nano elements or in cases when measurements are performed on high-precision (accurate) measuring machines which work in strictly air-conditioned spaces and the presence of the operator in such room during the programming of CMM could cause an increase in temperature, which in turn could make it necessary to wait some time until conditions stabilize. This article describes functioning of a simulator and its usage during Coordinate Measuring Machine programming in the latter situation. Article also describes a general process of programming CMMs which ensures the correct machine performance after starting the program on a real machine. As an example proving the presented considerations, measurement of exemplary workpiece, which was performed on the machine working in the strictly air-conditioned room, was described

Development of high-speed and high-precision CNC coordinate measuring machine

2019 ◽  
Vol 2019.72 (0) ◽  
pp. C42
Author(s):  
Yuto KAJITANI ◽  
Syuhei KUROKAWA ◽  
Tetsuya TAGUCHI ◽  
Yuuu MIYAMOTO ◽  
Terutake HAYASHI ◽  
...  
Keyword(s):  
High Precision ◽  
High Speed ◽  
Coordinate Measuring Machine ◽  
Measuring Machine
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